Method and apparatus for inspection

An electron beam apparatus comprising:

• a stage configured to support an object comprising a plurality of dies or fields, each field or die having a boundary to enable separation of the object into pieces;
• a plurality of electron beam columns, each electron beam column configured to provide concurrently a plurality of electron beams to the object when supported on the stage, each electron beam column arranged to inspect a different region of the object associated with the electron beam column and each electron beam having its own respective concurrent field of view at the object;
• and
• an actuator system configured to move one or more of the electron beam columns relative to another one or more of the electron beam columns in a direction closer to or further away from the object.

An electron beam apparatus comprising:

• a stage configured to support an object comprising a plurality of dies or fields, each field or die having a boundary to enable separation of the object into pieces;
• a stage configured to support the object;
• a plurality of electron beam optics, each electron beam optic configured to separately direct a plurality of electron beams concurrently to the object when supported on the stage, each electron beam optic arranged to inspect a different region of the object associated with the electron beam optic and each electron beam having its own respective concurrent field of view at the object;
• and
• an actuator system configured to move one or more of the electron beam optics relative to another one or more of the electron beam optics in a direction closer to or further away from the object.