Magnifying observation apparatus
AssigneeKeyence Corporation
InventorShigenori Takagi
Life of this patent
Estimating the term…
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AssigneeKeyence Corporation
InventorShigenori Takagi
Estimating the term…
Work to obtain an optical and an electron microscope images at an identical display size is facilitated. A magnifying observation apparatus includes: an electron beam imaging device that obtains an electron microscope image in a chamber; an optical imaging device that obtains an optical image in the chamber; a moving device that moves the both devices such that an optical axis direction of one of the both devices is aligned with an optical axis direction of the other device; a display section that displays the electron microscope and the optical images; and a magnifying power conversion section that recognizes a magnifying power of an image obtained by one of the imaging devices and converts the magnifying power, which is used to obtain an image having a display size substantially identical to that of the image, by the other device into a magnifying power on a basis of the other device.
A magnifying observation apparatus comprising:
A magnifying observation apparatus comprising:
Dependencies are inferred from the claim text.