Aberration correction in charged particle system
AssigneeASML Netherlands B.V.
InventorsAlexander Hendrik Vincent Van Veen, Willem Henk Urbanus, Marco Jan-Jaco Wieland
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Abstract
A lens element of a charged particle system comprises an electrode having a central opening. The lens element is configured for functionally cooperating with an aperture array that is located directly adjacent said electrode, wherein the aperture array is configured for blocking 5 part of a charged particle beam passing through the central opening of said electrode. The electrode is configured to operate at a first electric potential and the aperture array is configured to operate at a second electric potential different from the first electric potential. The electrode and the aperture array together form an aberration correcting lens.
Claims20
A lens element of a charged particle system, comprising:
- a body having a cavity formed therein for a path of a charged particle beam;
- and
- a cooling arrangement comprising multiple segments for cooling the lens element, wherein:
- an upper segment of the multiple segments is disposed at an upper portion of the body;
- the body is structured to receive the charged particle beam into the cavity via the upper portion;
- the upper segment comprises one or more channels configured to accommodate a fluid flowing around the path of the charged particle beam to cool the upper portion of the body,
- the one or more channels are formed within a solid structure of the body at least part of which forms the lens element,
- the one or more channels at the upper segment have a side channel arranged for fluid flow and having at least one section that extends substantially parallel to the path of the charged particle beam.
A charged particle system, comprising:
- a beam source for generating a charged particle beam;
- a body having a cavity formed therein for a path of the charged particle beam;
- and
- a cooling arrangement comprising multiple segments, wherein:
- an upper segment of the multiple segments is disposed at an upper portion of the body;
- the body is structured to receive the charged particle beam into the cavity via the upper portion;
- the upper segment comprises one or more channels configured to accommodate a fluid flowing around the path of the charged particle beam to cool the upper portion of the body,
- the one or more channels are formed within a solid structure of the body for cooling the body at least part of which forms a lens element of the charged particle system,
- the one or more channels at the upper segment have a side channel arranged for fluid flow and having at least one section that extends substantially parallel to the path of the charged particle beam.
A cooling arrangement of a lens element, comprising:
- multiple segments, wherein:
- an upper segment of the multiple segments is disposed at an upper portion of a body of the lens element;
- the body is structured to receive a charged particle beam into a cavity of the body via the upper portion;
- the upper segment comprises one or more channels configured to accommodate a fluid flowing around a path of a charged particle beam to cool the upper portion of the body,
- the one or more channels are formed within a solid structure of the body at least part of which forms the lens element,
- the one or more channels at the upper segment comprise a first channel arranged for fluid flow and having at least one section that extends substantially parallel to the path of the charged particle beam.
Dependencies are inferred from the claim text.