Charged beam drawing apparatus

A charged beam drawing apparatus comprising:

• a condenser lens for adjusting a charged beam emitted from a charged beam source to have a desired current density;
• a character mask having a plurality of different aperture patterns, to form the charged beam having a shape corresponding to select one of the aperture patterns;
• an objective lens for forming an image on a sample surface based on the charged beam formed by said character mask;
• an objective deflector for controlling the position of the charged beam on the sample surface;
• a driving mechanism for moving said character mask, objective lens and objective deflector in a preset plane;
• and
• an optical axis shifting deflector arranged nearer to the charged beam source than said character mask, for deflecting the charged beam in synchronism with an operation of said driving mechanism, wherein said driving mechanism reciprocally moves said character mask, objective lens and objective deflector in a preset plane to continuously change the moving speeds of said character mask, objective lens and objective deflector.