H01J 2237/31798
Detecting pattern defects
Official title: detecting pattern defects
H01J2237/31798 (Detecting pattern defects) appears on 47 US grants and 47 published applications in this corpus.
Search patents in H01J- Granted patents
- 47
- Published applications
- 47
- Assignees
- 24
- Inventors
- 98
- Latest grant
- 18 Feb 2025
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1986 | 1 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 1 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 1 | 0 |
| 2001 | 0 | 0 |
| 2002 | 1 | 0 |
| 2003 | 0 | 1 |
| 2004 | 0 | 0 |
| 2005 | 1 | 1 |
| 2006 | 0 | 1 |
| 2007 | 0 | 1 |
| 2008 | 0 | 0 |
| 2009 | 1 | 0 |
| 2010 | 0 | 1 |
| 2011 | 0 | 0 |
| 2012 | 1 | 1 |
| 2013 | 0 | 1 |
| 2014 | 3 | 2 |
| 2015 | 7 | 6 |
| 2016 | 3 | 4 |
| 2017 | 3 | 3 |
| 2018 | 4 | 8 |
| 2019 | 8 | 8 |
| 2020 | 5 | 2 |
| 2021 | 4 | 2 |
| 2022 | 1 | 1 |
| 2023 | 1 | 1 |
| 2024 | 0 | 0 |
| 2025 | 1 | 2 |
| 2026 | 0 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Recovery of a hierarchical functional representation of an integrated circuit18 Feb 2025US 12,229,482 B2Battelle Memorial Institute
- Recovery of a hierarchical functional representation of an integrated circuit16 May 2023US 11,651,126 B2Battelle Memorial Institute
- Anomaly determination method and writing apparatus15 Mar 2022US 11,275,044 B2NuFlare Technology, Inc.
- Multi charged particle beam evaluation method and multi charged particle beam writing device28 Dec 2021US 11,211,227 B2NuFlare Technology, Inc.
- Behavioral design recovery from flattened netlist18 May 2021US 11,010,519 B2Battelle Memorial Institute
- Charged particle beam writing method, charged particle beam writing apparatus, and non-transitory computer-readable storage medium storing a program5 Mar 2026US 2026/0066219 A1NuFlare Technology, Inc.
- Recovery of a hierarchical functional representation of an integrated circuit22 May 2025US 2025/0165686 A1Battelle Memorial Institute
- Scanning electron microscopic direct-write lithography system based on a compliant nano servo motion system16 Jan 2025US 2025/0021014 A1Tsinghua University
- Recovery of a hierarchical functional representation of an integrated circuit14 Sep 2023US 2023/0289502 A1Battelle Memorial Institute
- Scanning electron microscopic direct-write lithography system based on a compliant nano servo motion system15 Sep 2022US 2022/0291589 A1Tsinghua University
Most cited
By later US patents
- Apparatus and methods for electron beam detection111US 8,692,204 B2KLA-Tencor Corporation · 2014
- Electron-beam-projection-exposure apparatus with integrated mask inspection and cleaning portions38US 6,038,015 ANikon Corporation · 2000
- Compensation of defective beamlets in a charged-particle multi-beam exposure tool31US 9,269,543 B2IMS Nanofabrication GmbH · 2016
- Charged particle beam system29US 6,979,822 B1FEI Company · 2005
- Method and apparatus for detecting defect in circuit pattern of a mask for X-ray exposure17US 4,814,615 AHitachi, Ltd. · 1989