H01J 2237/2811
Large objects
H01J2237/2811 (Large objects) appears on 82 US grants and 90 published applications in this corpus.
Search patents in H01J- Granted patents
- 82
- Published applications
- 90
- Assignees
- 30
- Inventors
- 181
- Latest grant
- 11 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2001 | 0 | 1 |
| 2002 | 0 | 0 |
| 2003 | 1 | 0 |
| 2004 | 0 | 1 |
| 2005 | 0 | 0 |
| 2006 | 2 | 1 |
| 2007 | 0 | 0 |
| 2008 | 0 | 2 |
| 2009 | 1 | 2 |
| 2010 | 2 | 2 |
| 2011 | 2 | 5 |
| 2012 | 3 | 4 |
| 2013 | 5 | 4 |
| 2014 | 3 | 3 |
| 2015 | 4 | 5 |
| 2016 | 3 | 2 |
| 2017 | 6 | 4 |
| 2018 | 4 | 4 |
| 2019 | 4 | 6 |
| 2020 | 8 | 6 |
| 2021 | 4 | 7 |
| 2022 | 5 | 8 |
| 2023 | 5 | 10 |
| 2024 | 8 | 8 |
| 2025 | 6 | 4 |
| 2026 | 6 | 1 |
By publication year. 2026 runs to 8 Oct.
Recent patents
- Detector substrate for use in a charged particle multi-beam assessment tool11 Aug 2026US 12,706,272 B2ASML Netherlands B. V.
- Scanning electron microscope (SEM) measurement method and apparatus26 May 2026US 12,640,340 B2Samsung Electronics Co., Ltd.
- Method of imaging a sample with a charged particle beam device, method of calibrating a charged particle beam device, and charged particle beam device24 Feb 2026US 12,562,336 B2APPLIED Materials.Inc.
- Charged particle assessment tool, inspection method10 Feb 2026US 12,548,735 B2ASML Netherlands B. V.
- Charged particle optics, charged particle beam apparatus, and method for scanning a charged particle beam3 Feb 2026US 12,542,253 B2ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Charged particle assessment tool, inspection method28 May 2026US 2026/0148935 A1ASML Netherlands B. V.
- Automated application of drift correction to sample studied under electron microscope30 Oct 2025US 2025/0338020 A1Protochips, Inc.
- Charged-particle beam apparatus with large field-of-view and methods thereof31 Jul 2025US 2025/0246397 A1ASML Netherlands B. V.
- Microscopy imaging method and system22 May 2025US 2025/0166961 A1Fibics Incorporated
- Method for operating a multi-beam particle microscope, computer program product and multi-beam particle microscope27 Mar 2025US 2025/0104961 A1
Most cited
By later US patents
- Charged particle beam apparatus51US 8,334,520 B2Hitachi High-Technologies Corporation · 2012
- Method of inspecting a pattern and an apparatus thereof and a method of processing a specimen19US 7,116,816 B2Hitachi, Ltd. · 2006
- Electrostatic lens systems for secondary-electron mapping-projection apparatus, and mapping-projection apparatus and methods comprising same13US 6,608,308 B1Nikon Corporation · 2003
- Microscopy imaging method and system12US 9,633,819 B2Fibics Incorporated · 2017
- Method and device for synthesizing panorama image using scanning charged-particle microscope10US 8,767,038 B2Hitachi High-Technologies Corporation · 2014