Method and device for synthesizing panorama image using scanning charged-particle microscope

A method of synthesizing a panorama image using a scanning charged-particle microscope, comprising:

• an imaging recipe creating process, which includes:
• a region determining step of determining a wide-field imaging region on a sample imaged using a scanning charged-particle microscope,
• a local region determining step of splitting the wide-field imaging region on the sample determined in the region determining step into a plurality of local imaging regions and determining the same,
• an adjustment point determining step of determining the layout of adjustment points corresponding to the local imaging regions for imaging each of the plurality of local imaging regions split and determined in the local region determining step, and
• an imaging order determining step of determining the imaging order of the local imaging regions that have been split and determined in the local region determining step and the adjustment points, the layout of which is determined in the adjustment point determining step,
• wherein the imaging recipe creating process creates, as an imaging recipe, the imaging sequence including the coordinates of the local imaging regions, the coordinates of the adjustment points, and the imaging order of the local imaging regions and the adjustment points, and
• wherein in the image recipe creating process, when a layout of adjustment points of a local imaging region is determined in the adjustment point determining step, such that the imaging region of the adjustment points overlaps an optional local imaging region, the imaging sequence is created in the imaging order determining step as the imaging recipe, such that while the optional local imaging region overlapping the adjustment points meets the condition that imaging at the optional local imaging region is performed immediately after adjusting at an adjustment point for the optional local imaging region, at the imaging region corresponding to the adjustment points, imaging is performed immediately after adjusting at the adjustment points after imaging the optional local imaging region;
• an imaging process of sequentially imaging each of the plurality of local imaging regions on the sample, by using the scanning charged-particle microscope according to the imaging recipe created in the imaging recipe creating process;
• and
• a mosaic process of stitching together the local imaging region image group sequentially imaged in the imaging process by image processing, and generating a panorama image.