Charged particle optics, charged particle beam apparatus, and method for scanning a charged particle beam

A charged particle optics for a charged particle beam apparatus having a charged particle beam and a beam propagation direction of the charged particle beam apparatus, the charged particle optics comprising:

• a focusing lens being an objective lens, comprising:
• a first electrode with a first aperture;
• a second electrode with a second aperture, the second electrode being mechanically movable at least in a first direction perpendicular to the beam propagation direction;
• and
• an actuator coupled to the second electrode to move the second electrode in at least the first direction for displacement of the second aperture with respect to the first aperture;
• the charged particle optics further comprising:
• one or more deflectors positioned upstream of the second electrode to deflect the charged particle beam, based on the displacement of the second aperture with respect to the first aperture, to guide the charged particle beam through the second aperture.