Charged particle beam apparatus

A charged particle beam apparatus for conducting inspection or measurement of a target sample using a secondary particle image, the apparatus comprising:

• a biaxial rotating stage mechanism including a rotating stage which rotates the target sample placed thereon around a prescribed rotation center, a rotating arm which supports the rotating stage and moves the rotating stage along an arc-shaped path, means for driving and rotating the rotating stage, and means for driving the rotating arm;
• and
• a plurality of inspection mechanisms including a charged particle optical lens tube for acquiring the secondary particle image by irradiating the target sample with a primary charged particle beam,
• wherein the biaxial rotating stage mechanism includes:
• a support shaft which is provided at an end of the rotating arm opposite to the rotating stage supporting position and serves as a rotation center of the rotating arm;
• a guide mechanism which supports a basal part of the other end of the rotating arm opposite to the support shaft;
• and
• a driver which moves the rotating arm along the guide mechanism.

A method for acquiring a charged particle image using a charged particle beam apparatus having a biaxial rotating stage mechanism including a rotating stage which rotates a target sample placed thereon around a prescribed rotation center;

• a rotating arm which supports the rotating stage and moves the rotating stage along an arc-shaped path;
• means for driving and rotating the rotating stage;
• means for driving the rotating arm;
• and a plurality of inspection mechanisms including a charged particle optical lens tube for acquiring a secondary particle image by irradiating the target sample with a primary charged particle beam,
• the method comprising steps of:
• moving an end of the rotating arm opposite to the rotating stage supporting position in order to move an image acquiring position on the sample to a position right under the inspection mechanism;
• and
• acquiring a charged particle image of the target sample.