H01J 2237/2448
Secondary particle detectors
H01J2237/2448 (Secondary particle detectors) appears on 469 US grants and 483 published applications in this corpus.
Search patents in H01J- Granted patents
- 469
- Published applications
- 483
- Assignees
- 131
- Inventors
- 928
- Latest grant
- 25 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 1 | 0 |
| 1977 | 1 | 0 |
| 1978 | 0 | 0 |
| 1979 | 2 | 0 |
| 1980 | 0 | 0 |
| 1981 | 1 | 0 |
| 1982 | 1 | 0 |
| 1983 | 1 | 0 |
| 1984 | 2 | 0 |
| 1985 | 0 | 0 |
| 1986 | 2 | 0 |
| 1987 | 5 | 0 |
| 1988 | 2 | 0 |
| 1989 | 10 | 0 |
| 1990 | 4 | 0 |
| 1991 | 1 | 0 |
| 1992 | 4 | 0 |
| 1993 | 4 | 0 |
| 1994 | 0 | 0 |
| 1995 | 5 | 0 |
| 1996 | 3 | 0 |
| 1997 | 2 | 0 |
| 1998 | 1 | 0 |
| 1999 | 3 | 0 |
| 2000 | 2 | 0 |
| 2001 | 3 | 1 |
| 2002 | 3 | 1 |
| 2003 | 6 | 2 |
| 2004 | 1 | 5 |
| 2005 | 3 | 5 |
| 2006 | 6 | 13 |
| 2007 | 8 | 5 |
| 2008 | 7 | 14 |
| 2009 | 9 | 11 |
| 2010 | 11 | 6 |
| 2011 | 7 | 7 |
| 2012 | 7 | 12 |
| 2013 | 11 | 13 |
| 2014 | 14 | 14 |
| 2015 | 15 | 38 |
| 2016 | 27 | 20 |
| 2017 | 22 | 29 |
| 2018 | 29 | 20 |
| 2019 | 28 | 39 |
| 2020 | 38 | 32 |
| 2021 | 32 | 43 |
| 2022 | 30 | 35 |
| 2023 | 25 | 41 |
| 2024 | 20 | 22 |
| 2025 | 26 | 34 |
| 2026 | 24 | 21 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Charged particle beam device25 Aug 2026US 12,719,010 B2Hitachi High-Tech Corporation
- Processor system capable of communicating with multicharged particle beam device and method thereof25 Aug 2026US 12,719,014 B2Hitachi High-Tech Corporation
- Charged particle beam device, charged particle beam system, and adjustment method18 Aug 2026US 12,712,148 B2Hitachi High-Tech Corporation
- Charged particle beam device and imaging method18 Aug 2026US 12,712,149 B2Hitachi High-Tech Corporation
- Detector substrate for use in a charged particle multi-beam assessment tool11 Aug 2026US 12,706,272 B2ASML Netherlands B. V.
- Method for operating a particle beam apparatus, computer program product and particle beam apparatus for carrying out the method8 Oct 2026US 2026/0311958 A1Carl Zeiss Microscopy GmbH
- Charged particle beam device17 Sep 2026US 2026/0279717 A1Samsung Electronics Co., Ltd.
- Scanning electron microscope and specimen observation method10 Sep 2026US 2026/0269169 A1Hitachi High-Tech Corporation
- Analysis System10 Sep 2026US 2026/0269177 A1Hitachi High-Tech Corporation
- Inspection System3 Sep 2026US 2026/0260841 A1Hitachi High-Tech Corporation
Most cited
By later US patents
- Scanning electron microscope and method for production of semiconductor device by using the same90US 5,412,210 AHitachi, Ltd. · 1995
- Pattern inspection apparatus and electron beam apparatus86US 5,557,105 AFujitsu Limited · 1996
- Electron beam apparatus67US 5,412,209 AHitachi, Ltd. · 1995
- Scanning electron microscope66US 6,847,038 B2Hitachi, Ltd. · 2005
- Compact, integrated electron beam imaging system63US 5,122,663 AInternational Business Machine Corporation · 1992