Electron beam apparatus

An electron beam apparatus for observing a specimen having recesses, comprising:

• means for generating an electron beam;
• an objective lens for irradiating the beam on said specimen, said objective lens forming a focusing magnetic field on the surface of said specimen and having a pole piece hole through which said electron beam passes;
• an electrode for generating an electric field sufficient to draw out electrons characteristic of said specimen which are discharged from a recess in said specimen to the outside of said recess;
• detection means for detecting said electrons, said electrode being interposed between said detection means and said specimen;
• and
• means for scanning the electron beam on said specimen, where the scanning rate of said electron beam is 10 frames or more/second, the accelerating voltage of said electron beam is 1 kV or less and the electron beam amount of said electron beam is 10-11 A or less.

An electron beam apparatus for observing a specimen having recesses, comprising:

• means for generating an electron beam;
• an objective lens for irradiating the beam on said specimen, said objective lens forming a focusing magnetic field on the surface of said specimen and having a pole piece hole through which said electron beam passes;
• an electrode for generating an electric field sufficient to draw out electrons characteristic of said specimen which are discharged from a recess in said specimen to the outside of said recess;
• detection means for detecting said electrons, said electrode being interposed between said detection means and said specimens;
• and
• means for charging positively the surface of said specimen at at least the peripheral edge of said recess.

An electron beam apparatus for observing a specimen having recesses, comprising:

• means for generating an electron beam;
• means for irradiating the beam on said specimen;
• an electrode for generating a electric field sufficient to draw out electrons characteristic of said specimen which are discharged from a recess in said specimen by said beam to the outside of said recess;
• means for generating a magnetic field for focusing said electrons drawn out of said recess;
• means for storing first control data necessary for obtaining a desired detection result when said electric field is generated;
• means for storing second control data necessary for obtaining a desired detection result when said electric field is not applied to the specimen;
• and
• means for selecting said first control data or said second control data and controlling associated components of said electron beam apparatus on the basis of selected data.

A charged particle beam apparatus for observing a specimen having recesses, comprising:

• means for generating a charged particle beam;
• means for irradiating the beam on said specimen;
• an electrode for generating an electric field sufficient to draw out electrons characteristic of said specimen which are discharged from a recess in said specimen under irradiation of said beam to the outside of said recess;
• means for generating a magnetic field for focusing said electrons drawn out of said recess;
• means for detecting said electrons;
• means for storing first control data necessary for obtaining a desired detection result when said electric field is generated;
• and
• means for storing second control data necessary for obtaining a desired detection result when said electric field is not generated.

An electron beam apparatus for observing a specimen, comprising:

• a unit for generating an electron beam;
• means for irradiating the beam on said specimen;
• an electrode for applying an electric field to said specimen and causing electrons, discharged from said specimen by said beam and being characteristic of said specimen, to leave said specimen;
• means for detecting said electrons;
• means for storing first control data necessary for obtaining a desired checking result when said electric field is applied to said specimen;
• and
• means for storing second control data necessary for obtaining a desired checking result when said electric field is not applied to said specimen.

A scanning electron microscope for scanning an electron beam spot at an observation area on a specimen and fetching a signal generated secondarily from said observation area to produce an observation image, comprising:

• first imaging magnification setting means for setting a desired observation imaging magnification;
• second imaging magnification setting means for setting at least one of an imaging magnification lower than the observation imaging magnification higher than the observation imaging magnification;
• and
• means for performing image observation in any one of first to third observation modes of which the first mode is such that an electron beam is irradiated for a predetermined period of time at the low imaging magnification and thereafter image observation is effected at the observation imaging magnification, the second mode is such that an electron beam is irradiated for a predetermined period of time at the high imaging magnification and thereafter observation is effected at the observation imaging magnification and the third mode is such that an electron beam is irradiated for a predetermined period of time at one of the low imaging magnification and high imaging magnification, then an electron is further irradiated for a predetermined period of time at the other imaging magnification and thereafter observation is effected at the observation imaging magnification.

An electron beam apparatus for observing a specimen having a recess in its surface, comprising:

• means for generating an electron beam;
• an objective lens for irradiating and focusing the beam on the surface of the specimen, the objective lens forming a magnetic field substantially focused on the surface of the specimen;
• the objective lens including an upper pole piece delimiting a first hole and a lower pole piece delimiting a second hole, a size of the second hole being larger than a size of the first hole at least at opposing surfaces of the upper and lower pole pieces of the objective lens, the beam passing through the first and second holes of the upper and lower pole pieces of the objective lens;
• an electrode disposed in the objective lens for generating an electric field on the surface of the specimen and by which, together with the magnetic field, cause electrons characteristic of the specimen which are being discharged from the recess to be drawn out of the recess;
• and
• a detector for detecting the electrons.