Processor system capable of communicating with multicharged particle beam device and method thereof
AssigneeHitachi High-Tech Corporation
InventorsKaoru Sakai, Mayuka Osaki, Hajime Kawano
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Abstract
A processor system capable of communicating with the multi-charged particle beam device includes reducing an influence of first crosstalk caused by a first detector detecting secondary electrons from a second scanning region by recognizing a first ghost caused by the first crosstalk from a first image using the first image. The processor system modifies a first occurrence region of the first ghost, or outputs a defect candidate position as a defect position when the detected defect candidate position is outside the first occurrence region.
Claims16
A processor system comprising one or more memory resources and one or more processors and capable of communicating with a multi-charged particle beam device,
- wherein the multi-charged particle beam device is configured to:
- irradiate a first scanning region on a sample with a first charged particle beam;
- irradiate a second scanning region on the sample with a second charged particle beam in parallel with the irradiation with the first charged particle beam;
- detect secondary electrons from at least the first scanning region by a first detector to generate a first image;
- and
- detect secondary electrons from at least the second scanning region by a second detector to generate a second image, and
- the processor is configured to:
- store the first image and the second image in the memory resources;
- reduce an influence of first crosstalk caused by the first detector detecting the secondary electrons from the second scanning region by:
- (A) recognizing a first ghost caused by the first crosstalk from the first image using the second image;
- and
- (B) modifying a first occurrence region of the first ghost.
A processor system comprising one or more memory resources and one or more processors and capable of communicating with a multi-charged particle beam device,
- wherein the multi-charged particle beam device is configured to:
- irradiate a first scanning region on a sample with a first charged particle beam;
- irradiate a second scanning region on the sample with a second charged particle beam in parallel with the irradiation with the first charged particle beam;
- detect secondary electrons from at least the first scanning region by a first detector to generate a first image;
- and
- detect secondary electrons from at least the second scanning region by a second detector to generate a second image, and
- the processor is configured to:
- store the first image and the second image in the memory resources;
- detect a defect candidate position in the first image;
- and
- reduce an influence of first crosstalk caused by the first detector detecting the secondary electrons from the second scanning region by:
- (1) recognizing a first ghost caused by the first crosstalk from the first image using the second image;
- and
- (2) when the defect candidate position is outside the first occurrence region of the first ghost, outputting the defect candidate position as a defect position.
A method for correcting crosstalk in a processor system comprising one or more memory resources and one or more processors and capable of communicating with a multi-charged particle beam device, wherein the multi-charged particle beam device is configured to:
- irradiate a first scanning region on a sample with a first charged particle beam;
- irradiate a second scanning region on the sample with a second charged particle beam in parallel with the irradiation with the first charged particle beam;
- detect secondary electrons from at least the first scanning region by a first detector to generate a first image;
- and
- detect secondary electrons from at least the second scanning region by a second detector to generate a second image, and
- the method for correcting crosstalk, which is executed by the processor, comprises:
- storing the first image and the second image in the memory resources;
- reducing an influence of first crosstalk caused by the first detector detecting the secondary electrons from the second scanning region by:
- (A) recognizing a first ghost caused by the first crosstalk from the first image using the second image;
- and
- (B) correcting a first occurrence region of the first ghost, which is a region in the first image.
Dependencies are inferred from the claim text.