Charged particle beam device

Abstract

A charged particle beam device includes: a charged particle source configured to generate a charged particle beam; a scanning unit configured to scan a sample while deflecting the charged particle beam; a detector configured to detect secondary particles emitted from the sample and output a detection signal; and a control unit configured to generate an observation image of the sample based on the detection signal. The control unit generates a mixed-condition image, in which detection signals under different detection conditions are mixed in a single image, by changing a detection condition of the detector for each pixel in a process of scanning the sample, and uses the mixed-condition image to restore a single-condition image which is an image for each detection condition.

Dependencies are inferred from the claim text.