Charged particle beam device, charged particle beam system, and adjustment method
AssigneeHitachi High-Tech Corporation
InventorsJinyu Zhao, Ayumi Doi, Aoi Yamauchi, Shuichiro Takahashi
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Abstract
To correct a difference in signal intensity due to a difference in hardware, for example, temporal deterioration of the hardware in the same device, or a difference in signal intensity between different devices. An adjustment method according to the disclosure specifies an amplification gain with which the same detection signal intensity as that of a comparison target is obtained by comparing correspondence relationships between the detection signal intensity and the amplification gain at different time points in the same charged particle beam device or among different charged particle beam devices.
Claims16
An adjustment method for adjusting an amplification gain of an amplification unit, included in a solid-state electron multiplier tube or a micro channel plate, included in each of a plurality of charged particle beam devices configured to irradiate a sample with a charged particle beam,
- each of the charged particle beam devices including
- an irradiation unit configured to emit the charged particle beam,
- a detector configured to detect a secondary particle generated from the sample due to irradiation on the sample with the charged particle beam and output a detection signal indicating an intensity of the secondary particle,
- the amplification unit, which is configured to amplify the detection signal, and
- a processor configured to adjust the amplification gain of the amplification unit,
- the adjustment method comprising:
- a step of acquiring a first correspondence relationship at a first time point between an intensity of the detection signal and the amplification gain in a first charged particle beam device of the plurality of charged particle beam devices;
- a step of acquiring a second correspondence relationship at a second time point later than the first time point between the intensity of the detection signal and the amplification gain in the first charged particle beam device, or at the second time point between an intensity of the detection signal and the amplification gain in a second charged particle beam device of the plurality of charged particle beam devices;
- and
- a step of specifying, by comparing the first correspondence relationship with the second correspondence relationship, the amplification gain in the first charged particle beam device so as to obtain, at the second time point in the first charged particle beam device, a detection signal intensity with which measurement accuracy or sensitivity equivalent to that of the detection signal of the first charged particle beam device at the first time point or of the second charged particle beam device at the second time point is obtained, and outputting a result thereof.
Dependencies are inferred from the claim text.