Scanning electron microscope and method for production of semiconductor device by using the same

A method for production of a semiconductor device, comprising the steps of:

• etching a semiconductor device to form a depression;
• irradiating a primary electron beam to the device, the primary electron beam having energy sufficient to produce reflection electrons, reflected from within the depression in the device, that penetrate through the device so as to escape from the surface of the device, or that generate secondary electrons in the surface of the device by the reflection electrons while penetrating through the device;
• and
• detecting the reflection electrons or the secondary electrons.

A semiconductor fabrication apparatus, comprising:

• a first chamber in which an object has its surface manufactured;
• a second chamber in which the object is inspected;
• means for irradiating a primary electron beam to the object to be inspected, the primary electron beam having energy sufficient to produce reflection electrons, reflected from within a depression in the object, that penetrate through the object so as to escape from the surface of the object, or that generate secondary electrons in the surface of the object while penetrating through the object;
• means for connecting the first chamber and the second chamber;
• and
• means for transporting the object from the first chamber to the second chamber.

A method of observing a change in the state of a test part of a specimen present below the surface of the specimen, comprising the steps of:

• applying stress to said test part;
• irradiating a scanning particle beam to said test part;
• and
• observing said test part using secondary information resulting from interaction of primary information with a part of said specimen different from said test part, said primary information being generated as a result of interaction of said scanning particle beam with said test part.

An apparatus for displaying a scanning image of a specimen, comprising:

• means for irradiating a scanning particle beam to a specimens to produce primary information;
• means for interacting said primary information with said specimen to produce second information which is different to said first information;
• means for detecting said secondary information resulting;
• and
• means for forming an image of said specimen on the basis of the detected secondary information, and for displaying said image.

An apparatus for observing a test part located below the surface of a specimen, comprising:

• means for irradiating a scanning particle beam to said test part to produce primary information;
• means for interacting said primary information with a portion of said specimen other than said test part to produce second information;
• means for detecting said secondary information;
• and
• means for forming an image of said specimen on the basis of the detected secondary information, and for displaying said image.

An apparatus for observing a test part located below the surface of a specimen and surrounded by said specimen, comprising:

• means for irradiating a scanning particle beam to a portion of said specimen inclusive of said test part, said scanning particle beam having energy sufficient to penetrate through said specimen surrounding said test part on an optical path and to reach said test part to produce primary information.
• means for interacting said primary information with a portion of said specimen other than said test part to produce a second information;
• means for detecting said secondary information resulting, and
• means for forming an image of said specimen on the basis of the detected secondary information, and for displaying said image.

An apparatus for display of a scanning image of a specimen, comprising:

• irradiating means for irradiating a scanning particle beam on said specimen to produce first, second and third informations;
• first image forming means for forming a first image of a part of the specimen surface which is seen in the direction of irradiation of said scanning particle beam by using said first information resulting from interaction of said scanning particle beam with the specimen surface;
• means for interacting said primary information with a portion of said specimen other than said test part to produce second information;
• second image forming means for forming a second image of a desired part of said specimen which is unseen in the direction of irradiation of said particle beam by using said third information;
• and
• means for forming a third image which is a superimposed image of said first and second images.

A method for display of a scanning image of a specimen, comprising the steps of:

• irradiating a scanning particle beam on said specimens to produce first, second and third informations;
• forming a first image of a part of the specimen surface which is seen in the direction of irradiation of said scanning particle beam by using said first information resulting from interaction of said scanning particle beam with the specimen surface of said specimen;
• forming a second image of a desired part of said specimen which is unseen in the direction of irradiation of said scanning particle beam by using said third information resulting from interaction of said second information with said specimen surface;
• and
• forming a third image which is a superimposed image of said first and second images.