H01J 2237/1501
Beam alignment means or procedures
H01J2237/1501 (Beam alignment means or procedures) appears on 225 US grants and 255 published applications in this corpus.
Search patents in H01J- Granted patents
- 225
- Published applications
- 255
- Assignees
- 74
- Inventors
- 496
- Latest grant
- 8 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1994 | 1 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 2 | 0 |
| 1998 | 2 | 0 |
| 1999 | 2 | 0 |
| 2000 | 1 | 0 |
| 2001 | 3 | 0 |
| 2002 | 0 | 6 |
| 2003 | 3 | 1 |
| 2004 | 2 | 8 |
| 2005 | 9 | 9 |
| 2006 | 5 | 12 |
| 2007 | 6 | 11 |
| 2008 | 15 | 10 |
| 2009 | 8 | 11 |
| 2010 | 7 | 7 |
| 2011 | 7 | 3 |
| 2012 | 8 | 10 |
| 2013 | 5 | 7 |
| 2014 | 13 | 7 |
| 2015 | 10 | 13 |
| 2016 | 7 | 8 |
| 2017 | 12 | 9 |
| 2018 | 7 | 6 |
| 2019 | 9 | 19 |
| 2020 | 18 | 16 |
| 2021 | 14 | 18 |
| 2022 | 12 | 12 |
| 2023 | 13 | 13 |
| 2024 | 9 | 15 |
| 2025 | 10 | 12 |
| 2026 | 5 | 12 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Beam detector, multi-charged-particle-beam irradiation apparatus, and adjustment method for beam detector8 Sep 2026US 12,731,759 B2NuFlare Technology, Inc.
- Alignment determination method and computer program23 Jun 2026US 12,665,164 B2ASML Netherlands B. V.
- Multi-beam pattern definition device28 Apr 2026US 12,614,695 B2IMS Nanofabrication GmbH
- Charged particle microscope for examining a specimen, and method of determining an aberration of said charged particle microscope21 Apr 2026US 12,609,270 B2FEI Company
- Charged particle optics, charged particle beam apparatus, and method for scanning a charged particle beam3 Feb 2026US 12,542,253 B2ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Multipole magnet adjustment system and multipole magnet adjustment method13 Aug 2026US 2026/0237591 A1Kabushiki Kaisha Toshiba
- Rapid mode switching of charged-particle-beam devices13 Aug 2026US 2026/0237595 A1
- Method of configuring a charged particle beam system and charged particle beam system13 Aug 2026US 2026/0237599 A1ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Ion Beam Adjustment Method and Ion Beam Device23 Jul 2026US 2026/0213116 A1Hitachi High-Tech Corporation
- Method for the automated mechanical adjustment of a particle beam column, associated computer program product and particle beam column19 Mar 2026US 2026/0081097 A1
Most cited
By later US patents
- Charged particle beamlet exposure system64US 7,084,414 B2Mapper Lithography IP B.V. · 2006
- Apparatus of plural charged-particle beams51US 9,922,799 B2Hermes Microvision, Inc. · 2018
- Scanning particle beam instrument48US 7,348,557 B2Carl Zeiss SMT GmbH · 2008
- Method and apparatus for automatic adjustment of electron optics system and astigmatism correction in electron optics device44US 6,067,164 AKabushiki Kaisha Toshiba · 2000
- Pattern definition device with multiple multibeam array43US 8,546,767 B2IMS Nanofabrication GmbH · 2013