Method of configuring a charged particle beam system and charged particle beam system

A method of setting one or more beam influencing elements;

• the method comprising:
• receiving charged particle beam system settings;
• providing a configuration matrix M;
• and
• setting one or more beam influencing elements of a charged particle beam system according to the configuration matrix M and the charged particle beam system settings;
• wherein the configuration matrix M is configured to reduce crosstalk between different orders of charged particle beam system settings of the charged particle beam system.

A charged particle beam system comprising one or more beam influencing elements and a controller, wherein the controller is configured to:

• provide an initial configuration matrix of the charged particle beam system, the initial configuration matrix relating a plurality of charged particle beam system settings to respective configurations of the one or more beam influencing elements;
• and to provide a configuration matrix M from the initial configuration matrix;
• determine a correlation matrix C corresponding to the configuration matrix M of the charged particle beam system, the correlation matrix C describing an influence of configurations of the one or more beam influencing elements on at least one beam spot parameter of a charged particle beam of the charged particle beam system;
• replace the configuration matrix M based upon the correlation matrix C;
• and
• iteratively repeat a diagonalization iteration of determining the correlation matrix C corresponding to the configuration matrix M, and replacing the configuration matrix M, until the correlation matrix C corresponding to the configuration matrix M fulfills a diagonalization criterium.