H01J 2237/0216
Means for avoiding or correcting vibration effects
H01J2237/0216 (Means for avoiding or correcting vibration effects) appears on 156 US grants and 161 published applications in this corpus.
Search patents in H01J- Granted patents
- 156
- Published applications
- 161
- Assignees
- 67
- Inventors
- 385
- Latest grant
- 4 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1990 | 1 | 0 |
| 1991 | 1 | 0 |
| 1992 | 0 | 0 |
| 1993 | 1 | 0 |
| 1994 | 1 | 0 |
| 1995 | 1 | 0 |
| 1996 | 1 | 0 |
| 1997 | 0 | 0 |
| 1998 | 1 | 0 |
| 1999 | 2 | 0 |
| 2000 | 4 | 0 |
| 2001 | 4 | 1 |
| 2002 | 2 | 1 |
| 2003 | 2 | 1 |
| 2004 | 3 | 4 |
| 2005 | 6 | 6 |
| 2006 | 4 | 4 |
| 2007 | 4 | 2 |
| 2008 | 3 | 1 |
| 2009 | 2 | 6 |
| 2010 | 0 | 7 |
| 2011 | 9 | 6 |
| 2012 | 2 | 11 |
| 2013 | 6 | 12 |
| 2014 | 12 | 8 |
| 2015 | 12 | 13 |
| 2016 | 8 | 7 |
| 2017 | 9 | 9 |
| 2018 | 6 | 4 |
| 2019 | 5 | 14 |
| 2020 | 10 | 9 |
| 2021 | 8 | 5 |
| 2022 | 8 | 8 |
| 2023 | 8 | 4 |
| 2024 | 3 | 6 |
| 2025 | 3 | 9 |
| 2026 | 4 | 3 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Charged particle beam device and vibration-suppressing mechanism4 Aug 2026US 12,700,564 B2Hitachi High-Tech Corporation
- Charged particle beam apparatus28 Apr 2026US 12,614,692 B2Hitachi High-Tech Corporation
- System and apparatus for stabilizing electron sources in charged particle systems10 Mar 2026US 12,573,580 B2ASML Netherlands B. V.
- Automated beam on edge vibration analysis10 Feb 2026US 12,546,732 B2FEI Company
- Systems and methods for focusing charged—particle beams23 Dec 2025US 12,505,974 B2ASML Netherlands B. V.
- Charged particle beam device and control method therefor11 Jun 2026US 2026/0162929 A1Hitachi, Ltd.
- Vibration mitigation in ion implantation16 Apr 2026US 2026/0103790 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Systems and methods for focusing charged-particle beams19 Mar 2026US 2026/0081095 A1ASML Netherlands B. V.
- Stabilizing a tip wire of an electron source2 Oct 2025US 2025/0308832 A1Applied Materials Israel Ltd.
- Vibration isolator having a coil spring and an actuator11 Sep 2025US 2025/0283520 A1Integrated Dynamics Engineering GmbH
Most cited
By later US patents
- Support device64US 5,467,720 ACanon Kabushiki Kaisha · 1995
- Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former61US 6,855,929 B2Ebara Corporation · 2005
- Lithography tool with vibration isolation34US 5,508,518 AInternational Business Machines Corporation · 1996
- Image correction system for scanning electron microscope31US 4,907,287 AHitachi, Ltd. · 1990
- Scanning electron microscope30US 6,403,968 B1Hitachi, Ltd. · 2002