Automated beam on edge vibration analysis

An automated method performed via a computing device for providing support to a scientific instrument, the method comprising:

• running, with a processor, a first software module to selectively operate the scientific instrument in a spot mode and in an imaging mode;
• running, with the processor, a second software module to configure the first software module to implement a sequence of spot-mode measurements in a plurality of spots along a trajectory crossing an edge feature in a sample;
• and
• transmitting, via an interface device, communications between the processor and an acquisition circuit of the scientific instrument, the acquisition circuit being operable to steer a charged-particle beam with respect to the sample and to acquire signals produced via interaction of the charged-particle beam with the sample,
• wherein the second software module is configured to specify a respective spot location and a respective dwell time for each of the plurality of spots based on a calibrated disturbance waveform;
• wherein the first software module is configured to receive a time series of the signals acquired by the acquisition circuit during the sequence;
• and
• wherein the automated method further comprises computing, with the processor, a frequency spectrum of vibrational disturbances in the scientific instrument based on the time series.