US 6,403,968 B1 · Scanning electron microscope

Abstract

Oil from an oil source is introduced into an inside of a reciprocal oil hydraulic pressure cylinder through a port, and a lock shaft is pushed against a lock plate by the oil pressure to restrict movement of a tilt table. A cylindrical portion made of a material having a large friction coefficient to the lock plate is attached to a top end of the lock shaft so as to contact with the lock plate in a surface contact state. Releasing of stage locking is performed by introducing the oil into the inside of the reciprocal oil hydraulic pressure cylinder through another port to draw back the lock shaft by the oil pressure. Thereby, the stiffness of the sample stage lock mechanism in the x-direction becomes large and the friction force in the y- and z-directions also becomes large. Therefore, vibration of the tilt table in the x-, y- and z-directions can be effectively suppressed.

Claims11

Dependent claims

A scanning electron microscope comprising:

(1) a sample movement device for moving a sample, the sample movement device having.
(1-1) a first table for moving the sample in a first direction,
(1-2) a second table for moving the sample in a second direction perpendicular to the first direction,
(1-3) a tilting table for supporting said first and second tables, said tilting table supported on a rotating shaft so as to afford a tilting operation to the sample;
(2) an electron gun generating an electron beam, an axis of the electron beam being perpendicular to the first and second directions;
(3) means for scanning the sample with the electron beam to generate a signal characteristic of the sample and detecting the generated signal;
(4) a lock mechanism for locking said tilting table in a direction of the axis of the electron beam and in said first and second directions in a vibration-proof manner;
and
the lock mechanism is so constructed that the tilting table is pushed from the opposite direction of the electron beam to the rotating shaft for the tilting table using an oil hydraulic cylinder or a rotary pneumatic cylinder.

6 more elements

A scanning electron microscope comprising:

(1) a sample chamber for housing a sample;
(2) a sample movement device for moving the sample, said sample movement device having
(2-1) a first table for moving the sample in a first direction,
(2-2) a second table for moving the sample in a second direction perpendicular to the first direction,
(2-3) a third table for moving the sample in a third direction perpendicular to the first and second directions,
(2-4) a rotation table for rotating the sample, said rotation table supported on a rotating shaft
(2-5) a tilting table for supporting said first, second and third tables, said tilting table supported on a rotating shaft so as to afford tilting operation to the sample;
(3) an electron gun generating an electron beam, an axis of the electron beam agreeing with the third direction;
(4) means for scanning the sample with the electron beam to generate a signal characteristic of the sample and detecting the generated signal;
(5) a lock mechanism for locking said tilting table in said first, second and third directions in a vibration-proof manner;
and
the lock mechanism is so constructed that the tilting table is pushed from the opposite direction of the electron beam to the rotating shaft for the tilting table using an oil hydraulic cylinder or a rotary pneumatic cylinder.

9 more elements

Dependencies are inferred from the claim text.

Scanning electron microscope

Life of this patent

Scanning electron microscope

Life of this patent

Abstract

Claims11