Charged particle beam device and vibration-suppressing mechanism

A charged particle beam device comprising:

• a sample chamber for accommodating a sample that will serve as an object to be observed therein;
• a column that is disposed on an upper portion of the sample chamber and irradiates and scans the sample with a charged particle beam generated by a charged particle source;
• and
• a vibration-suppressing mechanism that is removably provided to the column,
• wherein the vibration-suppressing mechanism includes
• a fixing ring attached to an upper portion of the column,
• a stator affixed to the fixing ring via a spacer, such that an entirety of the stator is disposed above the fixing ring and the upper portion of the column, wherein an axial direction of the spacer is parallel to an axial direction of the column,
• an annular mover that is supported so as to be movable in a direction orthogonal to the axial direction of the column,
• a plurality of actuators that cause the mover to vibrate in the direction orthogonal to the axial direction of the column,
• a plurality of vibration sensors affixed to the stator, and
• a controller that controls the actuators according to output signals from the vibration sensors,
• wherein the mover is supported by an elastic member having elasticity with respect to the stator in an operation direction of the actuators, and
• wherein the actuators cause the mover to vibrate with respect to the stator to attenuate vibration generated in the column.