Charged particle beam device and control method therefor

Abstract

To provide a charged particle beam device that can reduce the influence of a vibration on charged particles which have been transmitted through a sample and a control method therefor. A charged particle beam device includes a sample holder that holds a sample, an electron source that emits a charged particle beam to be irradiated onto the sample, a detector that detects transmitted particles that are charged particles which have been transmitted through the sample, and a control unit that generates an observation image of the sample based on a detection signal output from the detector and controls each unit and further includes a vibrometer that measures a vibration of the sample holder, an upper deflector that is disposed between the electron source and the sample holder to deflect the charged particle beam, and a lower deflector that is disposed between the sample holder and the detector to deflect the transmitted particles, in which the control unit controls the upper deflector and the lower deflector based on a measured value of the vibrometer to correct deflection of the transmitted particles together with deflection of the charged particle beam.

Dependencies are inferred from the claim text.