H01H 2001/0089
Providing protection of elements to be released by etching of sacrificial element
Official title: {Providing protection of elements to be released by etching of sacrificial element; Avoiding stiction problems, e.g. of movable element to substrate}
H01H2001/0089 (Providing protection of elements to be released by etching of sacrificial element) appears on 29 US grants and 28 published applications in this corpus.
Search patents in H01H- Granted patents
- 29
- Published applications
- 28
- Assignees
- 24
- Inventors
- 63
- Latest grant
- 11 Mar 2025
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1990 | 2 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 1 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 1 | 0 |
| 2002 | 1 | 2 |
| 2003 | 2 | 7 |
| 2004 | 5 | 4 |
| 2005 | 5 | 2 |
| 2006 | 0 | 2 |
| 2007 | 0 | 1 |
| 2008 | 4 | 2 |
| 2009 | 0 | 1 |
| 2010 | 2 | 1 |
| 2011 | 1 | 0 |
| 2012 | 1 | 0 |
| 2013 | 1 | 1 |
| 2014 | 1 | 0 |
| 2015 | 0 | 0 |
| 2016 | 0 | 0 |
| 2017 | 0 | 0 |
| 2018 | 0 | 1 |
| 2019 | 0 | 1 |
| 2020 | 1 | 1 |
| 2021 | 0 | 0 |
| 2022 | 0 | 1 |
| 2023 | 0 | 0 |
| 2024 | 0 | 0 |
| 2025 | 1 | 0 |
| 2026 | 0 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Method for manufacturing variable radio frequency micro-electromechanical switch11 Mar 2025US 12,249,468 B2Airmems
- Microelectromechanical switch with metamaterial contacts22 Sep 2020US 10,784,066 B2Synergy Microwave Corporation
- Elimination of silicon residues from MEMS cavity floor30 Dec 2014US 8,921,165 B2Cavendish Kinetics, Inc.
- Methods for implementation of a switching function in a microscale device and for fabrication of a microscale switch16 Apr 2013US 8,420,427 B2Wispry, Inc.
- MEMS device having electrothermal actuation and release and method for fabricating11 Sep 2012US 8,264,054 B2Wispry, Inc.
- Broadband radio frequency micro-actuator switch with high isolation24 Sep 2026US 2026/0290714 A1Dell Products L. P.
- Variable radio frequency micro-electromechanical switch23 Jun 2022US 2022/0199333 A1Airmems
- Variable radio frequency micro-electromechanical switch8 Oct 2020US 2020/0321166 A1Airmems
- Mems dual substrate switch with magnetic actuation28 Feb 2019US 2019/0066937 A1Innovative Micro Technology
- Microelectromechanical switch with metamaterial contacts13 Sep 2018US 2018/0261415 A1Synergy Microwave Corporation
Most cited
By later US patents
- Micro-electromechanical switch135US 6,307,169 B1Motorola, Inc. · 2001
- Method for making micromechanical switch119US 5,262,000 ABritish Telecommunications Public Ltd.Co. · 1993
- MEMS device having contact and standoff bumps and related methods113US 6,876,482 B2Turnstone Systems, Inc. · 2005
- Trilayered beam MEMS device and related methods102US 6,746,891 B2Turnstone Systems, Inc. · 2004
- MEMS device having a trilayered beam and related methods99US 6,876,047 B2Turnstone Systems, Inc. · 2005