Broadband radio frequency micro-actuator switch with high isolation

A device, comprising:

• a micro-actuator-based switch, comprising:
• a substrate;
• a first metallic contact supported by the substrate;
• a second metallic contact supported by the substrate;
• a first metallic cantilever comprising an anchored portion and a first non-anchored portion, the first non-anchored portion comprising a first conductive tip proximate to the first metallic contact;
• a second metallic cantilever comprising the anchored portion and a second non-anchored portion, the second non-anchored portion comprising a second conductive tip proximate to the second metallic contact, wherein the first metallic cantilever is electrically coupled to the second metallic cantilever;
• a first electrostatic electrode between the anchored portion and the first non-anchored portion;
• and
• a second electrostatic electrode between the anchored portion and the second non-anchored portion,
• wherein a first voltage applied to the first electrostatic electrode bends the first non-anchored portion of the first metallic cantilever towards the substrate to electrically couple the first conductive tip to the first contact,
• wherein a second voltage applied to the second electrostatic electrode bends the second non-anchored portion of the second metallic cantilever towards the substrate to electrically couple the second conductive tip to the second metallic contact,
• wherein application of the first voltage in conjunction with application of the second voltage results in a signal path between the first metallic contact and the second metallic contact, and
• wherein removal of the first voltage unbends the first non-anchored portion of the first metallic cantilever away from the substrate to electrically decouple the first conductive tip from the first metallic contact, resulting in the first metallic contact and the second metallic contact being electrically isolated from one another.