Microelectromechanical switch with metamaterial contacts
AssigneeSynergy Microwave Corporation
InventorsShiban K. Koul, Ajay Kumar Poddar, Ulrich L. Rohde
Life of this patent
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Abstract
A microelectromechanical switch having improved isolation and insertion loss characteristics and reduced liability for stiction. The switch includes a signal line having an input port and an output port between first and second ground planes. The switch also includes a beam for controlling activation of the switch. In some embodiments, the switch further includes one or more defected ground structures formed in the first and second ground planes, and a corresponding secondary deflectable beam positioned over each defected ground structure. In some embodiments, the switch includes a metamaterial structure for generating a repulsive Casimir force.
Claims32
A microelectromechanical switch comprising:
- a signal line comprising each of an input port and an output port, the signal line formed on a substrate between a first ground plane and a second ground plane formed on the substrate;
- a primary deflectable beam having a first end, a second end, and a deflectable middle portion between the first and second ends, the first end supported by a first post formed over the first ground plane, the second end supported by a second post formed over the second ground plane, and the middle portion of the primary deflectable beam positioned over at least a portion of the input port and at least a portion of the output port, whereby the deflectable middle portion contacts each of the input port and output port when deflected downward;
- one or more defected ground structures formed in each of the first ground plane and the second ground plane;
- and
- for each defected ground structure, a corresponding secondary deflectable beam positioned over the defected ground structure.
A microelectromechanical switch comprising:
- a signal line comprising each of an input port and an output port, the signal line formed on a substrate between a first ground plane and a second ground plane formed on the substrate;
- a beam positioned above the signal line, whereby the beam is configured to move in an out-of plane direction relative to the signal line and ground planes, the beam including an upper contact configured to contact the signal line;
- and
- a metamaterial structure included in one of the upper contact and the signal line.
Dependencies are inferred from the claim text.