MEMS device having electrothermal actuation and release and method for fabricating

A microscale switch for electrostatic and electrothermal actuation, the switch comprising:

• (a) a substrate;
• (b) a stationary electrode formed on the substrate;
• (c) a stationary contact formed on the substrate;
• (d) a voltage source;
• (e) a first current source;
• and
• (f) a movable microcomponent suspended above the substrate, comprising:
• (i) a structural layer including at least one end fixed with respect to the substrate;
• (ii) a movable electrode positioned directly above the stationary electrode, spaced from the stationary electrode by a gap such that it does not contact the stationary electrode, and connected to the voltage source, wherein the movable electrode substantially covers an underside of the structural layer;
• and wherein the movable electrode is movable with respect to the stationary electrode when the voltage source applies a voltage difference between the stationary electrode and the movable electrode to establish electrostatic coupling between the movable electrode and the stationary electrode across the gap;
• (iii) a movable contact spaced from the stationary contact;
• and
• (iv) a first electrothermal component attached to the structural layer and connected to the first current source, the first electrothermal component being operable to produce heating when energized by the first current source for generating force for moving the structural layer.

A microscale switch for electrostatic and electrothermal actuation, the switch comprising:

• (a) a substrate;
• (b) a stationary electrode formed on the substrate;
• (c) a stationary contact formed on the substrate;
• (d) a voltage source;
• (e) a first current source;
• and
• (f) a movable microcomponent suspended above the substrate, comprising:
• (i) a structural layer including at least one end fixed with respect to the substrate;
• (ii) a movable electrode positioned directly above the stationary electrode, spaced from the stationary electrode by a gap such that it does not contact the stationary electrode, and connected to the voltage source, the movable electrode being movable with respect to the stationary electrode when the voltage source applies a voltage difference between the stationary electrode and the movable electrode to establish electrostatic coupling between the movable electrode and the stationary electrode across the gap;
• (iii) a movable contact spaced from the stationary contact;
• (iv) a first electrothermal component attached to the structural layer and connected to the first current source, the first electrothermal component being operable to produce heating when energized by the first current source for generating force for moving the structural layer;
• and
• (v) an electrode interconnect attached to a top surface of the structural layer opposite from the movable electrode and having electrical communication with the movable electrode, wherein the movable electrode and electrode interconnect have substantially equal respective coefficients of thermal expansion.

A microscale switch for electrostatic and electrothermal actuation, the switch comprising:

• (a) a substrate;
• (b) a stationary electrode formed on the substrate;
• (c) a stationary contact formed on the substrate;
• (d) a voltage source;
• (e) a first current source;
• and
• (f) a movable microcomponent suspended above the substrate, comprising:
• (i) a structural layer including at least one end fixed with respect to the substrate and the stationary electrode;
• (ii) a movable electrode positioned directly above the stationary electrode, spaced from the stationary electrode by a gap such that it does not contact the stationary electrode, and connected to the voltage source, the movable electrode being movable with respect to the stationary electrode when the voltage source applies a voltage difference between the stationary electrode and the movable electrode to establish electrostatic coupling between the movable electrode and the stationary electrode across the gap;
• (iii) a movable contact spaced from the stationary contact and also spaced from the stationary electrode, wherein the movable electrode is movable when the voltage difference is applied between the stationary electrode and the movable electrode;
• and
• (iv) a first electrothermal component being isolated from the movable and stationary electrodes, attached to the structural layer, connected to the first current source, and operable to produce heating when energized by the first current source for generating force for moving the structural layer, wherein the first electrothermal component is attached to a top side of the structural layer for producing heat on the top side of the structural layer to deflect the structural layer towards the substrate.

A microscale switch for electrostatic and electrothermal actuation, the switch comprising:

• (a) a substrate;
• (b) a stationary electrode formed on the substrate;
• (c) a stationary contact formed on the substrate;
• (d) a voltage source;
• (e) a first current source;
• (f) a second current source;
• and
• (g) a movable microcomponent suspended above the substrate, comprising:
• (i) a structural layer including at least one end fixed with respect to the substrate;
• (ii) a movable electrode positioned directly above the stationary electrode, spaced from the stationary electrode by a gap such that it does not contact the stationary electrode and connected to the voltage source, the movable electrode being movable with respect to the stationary electrode when the voltage source applies a voltage difference between the stationary electrode and the movable electrode to establish electrostatic coupling between the movable electrode and the stationary electrode across the gap;
• (iii) a movable contact spaced from the stationary contact;
• (iv) a first electrothermal component attached to the structural layer and connected to the first current source, the first electrothermal component being operable to produce heating when energized by the first current source for generating force for moving the structural layer;
• and
• (v) a second electrothermal component attached to an underside of the structural layer and connected to the second current source, the second electrothermal component being operable for producing heat when energized by the second current source on the underside of the structural layer to deflect the structural layer away from the substrate,
• wherein the first electrothermal component is attached to a top side of the structural layer for producing heat on the top side of the structural layer to deflect the structural layer towards the substrate.

A microscale switch for electrostatic and electrothermal actuation, the switch comprising:

• (a) a substrate;
• (b) a stationary electrode formed on the substrate;
• (c) a stationary contact formed on the substrate;
• (d) a voltage source;
• (e) a first current source;
• and
• (f) a movable microcomponent suspended above the substrate, comprising:
• (i) a structural layer including at least one end fixed with respect to the substrate;
• (ii) a movable electrode positioned directly above the stationary electrode, spaced from the stationary electrode by a gap such that it does not contact the stationary electrode and connected to the voltage source, the movable electrode being movable with respect to the stationary electrode when the voltage source applies a voltage difference between the stationary electrode and the movable electrode to establish electrostatic coupling between the movable electrode and the stationary electrode across the gap;
• (iii) a movable contact spaced from the stationary contact;
• and
• (iv) a first electrothermal component attached to the structural layer along a majority of a length of the structural layer and connected to the first current source, the first electrothermal component being operable to produce heating when energized by the first current source for generating force for moving the structural layer,
• wherein the movable component substantially covers an underside of the structural layer.

A microscale switch for electrostatic and electrothermal actuation, the switch comprising:

• (a) a substrate;
• (b) a stationary electrode formed on the substrate;
• (c) a stationary contact formed on the substrate;
• (d) a voltage source;
• (e) a first current source;
• (f) a movable microcomponent suspended above the substrate, comprising:
• (i) a structural layer including at least one end fixed with respect to the substrate;
• (ii) a movable electrode positioned directly above the stationary electrode, spaced from the stationary electrode by a gap such that it does not contact the stationary electrode, and connected to the voltage source, the movable electrode being movable with respect to the stationary electrode when the voltage source applies a voltage difference between the stationary electrode and the movable electrode to establish electrostatic coupling between the movable electrode and the stationary electrode across the gap;
• (iii) a movable contact spaced from the stationary contact;
• and
• (iv) a first electrothermal component attached to the structural layer along a majority of a length of the structural layer and connected to the first current source, the first electrothermal component being operable to produce heating when energized by the first current source for generating force for moving the structural layer;
• and
• (g) an electrode interconnect attached to a top surface of the structural layer opposite from the movable electrode and having electrical communication with the movable electrode.

A microscale switch for electrostatic and electrothermal actuation, the switch comprising:

• (a) a substrate;
• (b) a stationary electrode formed on the substrate;
• (c) a stationary contact formed on the substrate;
• (d) a voltage source;
• (e) a first current source;
• (f) a second current source;
• and
• (g) a movable microcomponent suspended above the substrate, comprising:
• (i) a structural layer including at least one end fixed with respect to the substrate;
• (ii) a movable electrode positioned directly above the stationary electrode, spaced from the stationary electrode by a gap such that it does not contact the stationary electrode, and onnected to the voltage source, the movable electrode being movable with respect to the stationary electrode when the voltage source applies a voltage difference between the stationary electrode and the movable electrode to establish electrostatic coupling between the movable electrode and the stationary electrode across the gap;
• (iii) a movable contact spaced from the stationary contact;
• (iv) a first electrothermal component attached to the structural layer along a majority of a length of the structural layer and connected to the first current source, the first electrothermal component being, operable to produce heating when energized by the first current source for generating force for moving the structural layer, wherein the first electrothermal component is attached to a top side of the structural layer for producing heat on the top side of the structural layer to deflect the structural layer towards the substrate;
• and
• (v) a second electrothermal component attached to an underside of the structural layer and connected to the second current source, the second electrothermal component being operable for producing heat on the underside of the structural layer when energized by the second current source for producing heat on the underside of the structural layer to deflect the structural layer away from the substrate.