Micro-electromechanical switch
AssigneeMotorola, Inc.
InventorsXi-Qing Sun, John Michael Parsey, Jr., Jenn-Hwa Huang, Ji-Hai Xu
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AssigneeMotorola, Inc.
InventorsXi-Qing Sun, John Michael Parsey, Jr., Jenn-Hwa Huang, Ji-Hai Xu
Estimating the term…
A Micro-Electromechanical System (MEMS) switch (100) having a single, center hinge (120) which supports a membrane-type electrode (104) on a substrate (101). The single, center hinge (120) has a control electrode (104) coupled to the substrate (101) by an anchor (113), a hinge collar (121), a set of hinge arms (122, 123). The control electrode (104) has a shorting bar (106) coupled thereto and is electrically isolated from another control electrode (105), which is formed on the substrate (101). A travel stop (130) is positioned between the substrate and the control electrode (104). Another aspect of the present invention is a Single Pole, Double Throw (SPDT) switch (160) into which is incorporated the single, center hinge (170) and the travel stop (185, 186).
A Micro Electro-Mechanical System (MEMS) switch, comprising:
A Micro Electro-Mechanical System (MEMS) switch, comprising:
A Single Pole, Double Throw (SPDT) Micro-electromechanical (MEMS) switch, comprising:
Dependencies are inferred from the claim text.