H01H 1/0036
Switches making use of microelectromechanical systems [mems]
Official title: {Switches making use of microelectromechanical systems [MEMS] (for electromagnetic relays H01H50/005; for electrostatic relays H01H59/0009)}
H01H1/0036 (Switches making use of microelectromechanical systems [mems]) appears on 1,014 US grants and 890 published applications in this corpus.
Search patents in H01H- Granted patents
- 1,014
- Published applications
- 890
- Assignees
- 366
- Inventors
- 1,669
- Latest grant
- 29 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1982 | 1 | 0 |
| 1983 | 1 | 0 |
| 1984 | 1 | 0 |
| 1985 | 3 | 0 |
| 1986 | 1 | 0 |
| 1987 | 4 | 0 |
| 1988 | 4 | 0 |
| 1989 | 2 | 0 |
| 1990 | 6 | 0 |
| 1991 | 4 | 0 |
| 1992 | 4 | 0 |
| 1993 | 9 | 0 |
| 1994 | 10 | 0 |
| 1995 | 14 | 0 |
| 1996 | 4 | 0 |
| 1997 | 13 | 0 |
| 1998 | 15 | 0 |
| 1999 | 17 | 0 |
| 2000 | 27 | 0 |
| 2001 | 52 | 13 |
| 2002 | 40 | 48 |
| 2003 | 47 | 71 |
| 2004 | 77 | 91 |
| 2005 | 48 | 59 |
| 2006 | 52 | 39 |
| 2007 | 35 | 40 |
| 2008 | 34 | 33 |
| 2009 | 35 | 39 |
| 2010 | 39 | 34 |
| 2011 | 33 | 39 |
| 2012 | 31 | 37 |
| 2013 | 38 | 23 |
| 2014 | 38 | 42 |
| 2015 | 35 | 29 |
| 2016 | 31 | 40 |
| 2017 | 27 | 18 |
| 2018 | 33 | 41 |
| 2019 | 31 | 24 |
| 2020 | 28 | 19 |
| 2021 | 27 | 19 |
| 2022 | 11 | 13 |
| 2023 | 12 | 14 |
| 2024 | 12 | 20 |
| 2025 | 16 | 26 |
| 2026 | 12 | 19 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
- H01H 2001/0042Bistable switches, i.e. having two stable positions requiring only actuating energy forIndexing code199
- H01H 2001/0084With perpendicular movement of the movable contact relative to the substrateIndexing code141
- H01H 2001/0078With parallel movement of the movable contact relative to the substrateIndexing code120
- H01H 2001/0052Special contact materials used for memsIndexing code78
- H01H 2001/0063Having electrostatic latches, i.e. the activated position is kept by electrostatic forcesIndexing code47
- H01H 2001/0068With multi dimensional movement, i.e. the movable actuator performing movements in atIndexing code44
- H01H 2001/0089Providing protection of elements to be released by etching of sacrificial elementIndexing code29
- H01H 2001/0073Solutions for avoiding the use of expensive silicon technologies in micromechanical switchesIndexing code21
Recent patents
- Electrical contact system with liquid metal layer and diffusion barrier29 Sep 2026US 12,749,631 B2Eaton Intelligent Power Limited
- Spark gaps with high current capability for electrical overstress detection and protection25 Aug 2026US 12,719,242 B2Analog Devices International Unlimited Company
- Electromechanical switches on input/output (I/O) components18 Aug 2026US 12,711,084 B2Micron Technology, Inc.
- Electromechanical switch4 Aug 2026US 12,700,557 B2Texas Instruments Incorporated
- MEMS switch with high off state voltage standoff rating23 Jun 2026US 12,665,140 B2Menlo Microsystems, Inc.
- Capacitive rf microswitch for high-power applications8 Oct 2026US 2026/0311937 A1
- Failsafe ohmic-capacitive membrane actuator-based radio frequency switch24 Sep 2026US 2026/0290713 A1Dell Products L. P.
- Broadband radio frequency micro-actuator switch with high isolation24 Sep 2026US 2026/0290714 A1Dell Products L. P.
- Mems bridge24 Sep 2026US 2026/0290715 A1Sofant Technologies Ltd
- Mems component and method for producing a mems component13 Aug 2026US 2026/0237570 A1
Most cited
By later US patents
- Bistable microelectromechanical actuator511US 5,867,302 ASandia Corporation · 1999
- Microminiature, monolithic, variable electrical signal processor and apparatus including same455US 5,526,172 ATexas Instruments Incorporated · 1996
- Shape-memory alloy micro-actuator445US 5,061,914 ATiNi Alloy Company · 1991
- Micromechanical switch with insulated switch contact426US 5,638,946 ANortheastern University · 1997
- Thin film shape memory alloy and method for producing411US 4,864,824 AAmerican Telephone and Telegraph Company, AT&T Bell Laboratories · 1989