Mems component and method for producing a mems component

A MEMS component, comprising:

• a first component element;
• and
• a second component element that is movable relative to the first component element in a contacting direction;
• wherein a first contact element is formed on the first component element, and a second contact element is formed on the second component element,
• wherein the first contact element protrudes from a first element surface of the first component element and/or the second contact element protrudes from a second element surface of the second component element,
• wherein a regeneration layer is formed on the first element surface and/or on the second element surface, and
• wherein the regeneration layer is configured to be atomized during sparking caused by contacting of the first contact element and the second contact element.

A method for producing a MEMS component, comprising the following steps:

• providing a component element which has at least one contact element, wherein the component element includes a substrate and an insulating layer formed on the substrate, and wherein the at least one contact element protrudes from an element surface defined by a surface of the insulating layer;
• depositing a regeneration layer onto the insulating layer and at least partially covering the at least one contact element and/or the surface of the insulating layer by the regeneration layer;
• and at least one of:
• removing the regeneration layer from a contacting surface of the contact element, and/or
• removing the regeneration layer from the insulating layer and creating a distance between the contacting surface of the at least one contact element and a surface of the regeneration layer.