Spark gaps with high current capability for electrical overstress detection and protection

An electrical overstress (EOS) monitor or protection device comprising:

• a substrate having a horizontal main surface;
• a first conductive layer and a second conductive layer, each extending over the substrate and substantially parallel to the horizontal main surface while being separated in a vertical direction crossing the horizontal main surface,
• wherein one of the first and second conductive layers is electrically connected to a first voltage node and the other of the first and second conductive layers is electrically connected to a second voltage node,
• wherein the first conductive layer comprises a plurality of arcing tips laterally extending to overlap with the second conductive layer, and
• wherein the arcing tips are configured to form arcing electrode pairs with the second conductive layer to form an arc discharge in response to an EOS voltage between the first and second voltage nodes;
• and
• a series ballast resistor defined in the first conductive layer and electrically connected between each of the arcing tips and the first voltage node, wherein a resistance of the series ballast resistor is substantially higher than a resistance of the second conductive layer.