H01H 2001/0052
Special contact materials used for mems
Official title: {Special contact materials used for MEMS}
H01H2001/0052 (Special contact materials used for mems) appears on 78 US grants and 87 published applications in this corpus.
Search patents in H01H- Granted patents
- 78
- Published applications
- 87
- Assignees
- 52
- Inventors
- 225
- Latest grant
- 29 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1991 | 1 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 1 | 0 |
| 1995 | 1 | 0 |
| 1996 | 0 | 0 |
| 1997 | 2 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 1 | 0 |
| 2001 | 3 | 0 |
| 2002 | 2 | 6 |
| 2003 | 2 | 4 |
| 2004 | 2 | 3 |
| 2005 | 2 | 3 |
| 2006 | 1 | 4 |
| 2007 | 4 | 1 |
| 2008 | 0 | 4 |
| 2009 | 2 | 4 |
| 2010 | 5 | 4 |
| 2011 | 4 | 9 |
| 2012 | 2 | 5 |
| 2013 | 7 | 0 |
| 2014 | 4 | 5 |
| 2015 | 4 | 3 |
| 2016 | 2 | 7 |
| 2017 | 4 | 5 |
| 2018 | 6 | 5 |
| 2019 | 3 | 4 |
| 2020 | 6 | 2 |
| 2021 | 1 | 2 |
| 2022 | 3 | 1 |
| 2023 | 0 | 1 |
| 2024 | 1 | 2 |
| 2025 | 1 | 1 |
| 2026 | 1 | 2 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Electrical contact system with liquid metal layer and diffusion barrier29 Sep 2026US 12,749,631 B2Eaton Intelligent Power Limited
- Method for manufacturing a MEMS switch having an embedded metal contact18 Feb 2025US 12,230,457 B2Robert Bosch GmbH
- MEMS device built on substrate with ruthenium based contact surface material19 Nov 2024US 12,148,580 B2Menlo Microsystems, Inc.
- MEMS device built on substrate with ruthenium based contact surface material15 Nov 2022US 11,501,928 B2Menlo Microsystems, Inc.
- Electrostatic drive switch27 Sep 2022US 11,456,137 B2Korea Advanced Institute of Science and Technology
- Mems component and method for producing a mems component13 Aug 2026US 2026/0237570 A1
- Two stage plating for reduced Ni and NiO layer formation15 Jan 2026US 2026/0015222 A1Menlo Microsystems, Inc.
- Electromechanical switch and method for manufacturing the same27 Nov 2025US 2025/0364198 A1Korea Advanced Institute of Science and Technology
- Contact element of a mems relay7 Nov 2024US 2024/0371577 A1
- Electrical contact system with liquid metal layer and diffusion barrier15 Aug 2024US 2024/0274373 A1Eaton Intelligent Power Limited
Most cited
By later US patents
- Micromechanical switch with insulated switch contact426US 5,638,946 ANortheastern University · 1997
- Miniature inductor for integrated circuits and devices167US 5,070,317 A1991
- Piezoelectric resonator structures with a bending element performing a voltage controlled switching function147US 6,204,737 B1Nokia Mobile Phones Ltd. · 2001
- Micromachining methods for making micromechanical moving structures including multiple contact switching system127US 5,454,904 AGeneral Electric Company · 1995
- Integrated electrostatically-actuated micromachined all-metal micro-relays97US 6,054,659 AGeneral Motors Corporation · 2000