Contact element of a mems relay

A method for producing a contact element for a MEMS relay, comprising the following steps:

• depositing and structuring a plastically deformable layer;
• depositing an insulation layer onto the structured, plastically deformable layer;
• introducing holes into the insulation layer;
• filling the holes with an electrically conductive material;
• carrying out a polishing step of the electrically conductive material with a stop on the insulation layer;
• and
• removing the insulation layer.

A method for leveling contact bodies of a contact element of a MEMS relay,

• wherein the contact element includes:
• a defined number greater than one of electrically conductive contact bodies, wherein the contact bodies are arranged at least partially within an electrically conductive, plastically deformable layer, wherein a hardness of the plastically deformable layer is less than a hardness of the contact bodies, wherein, by applying a compressive force to the contact bodies, the contact bodies can be pressed into the plastically deformable layer and brought to a substantially uniform height level, and wherein the plastically deformable layer is arranged at least partially within an insulation layer;
• wherein the method comprises:
• applying a compressive force to the contact bodies and pressing the contact bodies into the plastically deformable layer of the contact element to a uniform height level of the contact bodies, wherein the application of the compressive force is caused by striking a contact structure of the MEMS relay that is arranged movably relative to the contact element, against the contact bodies.