Electrostatic drive switch
AssigneeKorea Advanced Institute of Science and Technology
InventorsJun-Bo Yoon, Su-Bon Kim, Yong-Bok Lee
Life of this patent
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Abstract
Provided is an electrostatic drive switch, which includes a source plate to which a voltage for driving the electrostatic drive switch is applied and a drain electrode spaced apart from the source plate. The source plate includes a source electrode and an elastic part connected to the source electrode, and a first material and a second material having lower hardness than the first material are provided on the source electrode. When the source electrode and the drain electrode are electrically connected to each other by the voltage, the second material is brought into contact with the drain electrode by the elastic part after the first material is brought into contact with the drain electrode by the elastic part.
Claims12
An electrostatic drive switch comprising:
- a source plate to which a voltage for driving the electrostatic drive switch is applied;
- and
- a drain electrode spaced apart from the source plate,
- wherein the source plate comprises a source electrode and an elastic part connected to the source electrode, the elastic part comprising a first elastic portion disposed in an outer portion of the source plate and a second elastic portion separated from the first elastic portion,
- a first material and a second material having lower hardness than the first material are provided on the source electrode, and
- when the source electrode and the drain electrode are electrically connected to each other by the voltage, the second material is brought into contact with the drain electrode by the second elastic portion after the first material is brought into contact with the drain electrode by the first elastic portion.
Dependencies are inferred from the claim text.