US 6,054,659 A · Integrated electrostatically-actuated micromachined all-metal micro-relays

Abstract

Structures and fabrication methods of micromachined all-metal relays on silicon chips are described. The relay comprises a copper blade, electroformed into the lithographically patterned areas, with suitable dimensions of 1 mm.times.2 mm.times.0.01 mm (width.times.length.times.thickness) and a plurality of longitudinal slots to facilitate fabrication of the blade. The relay is actuated by electrostatic force, and no conduction current is required to hold the relay at either "on" or "off" state. Preferably, the relay is used in combination with a suitable arc suppression circuit.

Claims19

Dependent claims

An electrostatically-actuated, metallic micro-relay comprising

a semiconductor substrate having an electrically insulative surface layer,
a metal blade having two ends, a length, width and thickness, and a plurality of longitudinal slots extending through the thickness of said blade, said blade overlying said insulative layer and anchored at at least one of said ends to said layer,
an electrostatic actuator on said insulative layer underlying said blade, said actuator being operable between an actuator off condition and an actuator on condition, there being a first gap dimension between said blade and said actuator when the actuator is in said off condition, and
an electrical contact on said layer engageable by said blade when said actuator is in said on condition, said contact being spaced from said blade by a second gap dimension during said off condition.

1 more element

Dependencies are inferred from the claim text.

Integrated electrostatically-actuated micromachined all-metal micro-relays

Life of this patent

Integrated electrostatically-actuated micromachined all-metal micro-relays

Life of this patent

Abstract

Claims19