Methods for implementation of a switching function in a microscale device and for fabrication of a microscale switch

A method for implementing a switching function in a microscale device, comprising:

• (a) providing a stationary electrode and a stationary contact formed on a substrate;
• (b) providing a movable microcomponent suspended above the substrate and comprising:
• (i) a structural layer including at least one end fixed with respect to the substrate;
• (ii) a movable electrode spaced from the stationary electrode by a gap having a first distance, wherein the movable electrode is movable with respect to the stationary electrode when a voltage source is connected between the stationary electrode and the movable electrode;
• (iii) a movable contact spaced from the stationary contact, the movable contact being positioned farther from the at least one end than the movable electrode;
• and
• (iv) a first electrothermal component attached to the structural layer, the first electrothermal component being electrically isolated from the movable electrode and the stationary electrode and operable to produce heating when connected to a current source;
• (c) operating the voltage source to apply a voltage difference between the movable electrode and the stationary electrode to electrostatically couple the movable electrode with the stationary electrode, whereby electrostatically coupling the movable electrode with the stationary electrode deflects the movable component toward the substrate and moves the movable contact into contact with the stationary contact to permit an electrical signal to pass through the movable and stationary contacts;
• and
• (d) operating the current source to apply a current through the first electrothermal component to produce heating for generating force for facilitating movement of the microcomponent, wherein facilitating movement of the microcomponent comprises reducing the size of the gap to a second distance that is less than the first distance, and wherein operating the voltage source comprises applying a second voltage difference to deflect the movable component across the second distance, the second voltage difference being less than a first voltage difference required to deflect the movable component across the first distance.