G03F 1/66
Containers specially adapted for masks, mask blanks or pellicles
Official title: Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
G03F1/66 (Containers specially adapted for masks, mask blanks or pellicles) appears on 288 US grants and 350 published applications in this corpus.
Search patents in G03F- Granted patents
- 288
- Published applications
- 350
- Assignees
- 106
- Inventors
- 585
- Latest grant
- 22 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1981 | 1 | 0 |
| 1982 | 0 | 0 |
| 1983 | 1 | 0 |
| 1984 | 0 | 0 |
| 1985 | 1 | 0 |
| 1986 | 2 | 0 |
| 1987 | 1 | 0 |
| 1988 | 3 | 0 |
| 1989 | 1 | 0 |
| 1990 | 0 | 0 |
| 1991 | 1 | 0 |
| 1992 | 1 | 0 |
| 1993 | 0 | 0 |
| 1994 | 6 | 0 |
| 1995 | 3 | 0 |
| 1996 | 2 | 0 |
| 1997 | 1 | 0 |
| 1998 | 5 | 0 |
| 1999 | 3 | 0 |
| 2000 | 2 | 0 |
| 2001 | 6 | 3 |
| 2002 | 4 | 3 |
| 2003 | 4 | 11 |
| 2004 | 8 | 7 |
| 2005 | 6 | 10 |
| 2006 | 6 | 17 |
| 2007 | 6 | 12 |
| 2008 | 10 | 10 |
| 2009 | 6 | 13 |
| 2010 | 10 | 4 |
| 2011 | 4 | 5 |
| 2012 | 7 | 6 |
| 2013 | 5 | 8 |
| 2014 | 4 | 2 |
| 2015 | 3 | 6 |
| 2016 | 3 | 8 |
| 2017 | 8 | 6 |
| 2018 | 5 | 9 |
| 2019 | 6 | 13 |
| 2020 | 11 | 21 |
| 2021 | 20 | 33 |
| 2022 | 22 | 31 |
| 2023 | 16 | 37 |
| 2024 | 24 | 31 |
| 2025 | 30 | 29 |
| 2026 | 20 | 15 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Reticle-like sensing assembly22 Sep 2026US 12,743,018 B2Microprogram Information Co., Ltd.
- Reticle clamping module22 Sep 2026US 12,743,028 B2Gudeng Equipment Co., Ltd.
- Extreme ultraviolet inner pod seal gap8 Sep 2026US 12,730,371 B2Entegris, Inc.
- Pellicle holding module, pellicle thermal durability evaluation device comprising same, and pellicle thermal durability evaluation method25 Aug 2026US 12,717,226 B2Iucf-Hyu (Industry-University Cooperation Foundation Hanyang University)
- Mask inspection apparatus18 Aug 2026US 12,710,701 B2Stek Co., Ltd.
- Reticle container with directed purge flow17 Sep 2026US 2026/0277095 A1Entegris, Inc.
- Orientable semiconductor container and orientation system for semiconductor container3 Sep 2026US 2026/0259513 A1Gudeng Precision Industrial Co., Ltd.
- Nanotube pellicle film, pellicle, exposure original plate, and exposure device20 Aug 2026US 2026/0244092 A1Mitsui Chemicals, Inc.
- Apparatus and method for cleaning pot-shaped hollow bodies, in particular transport containers for semiconductor wafers or for lithography masks23 Jul 2026US 2026/0208241 A1Gsec German Semiconductor Equipment Company GmbH
- Storage container opening/closing device and storage container opening/closing method23 Jul 2026US 2026/0211312 A1Lintec Corporation
Most cited
By later US patents
- Sealable transportable container having improved liner166US 5,611,452 AAsyst Technologies, Inc. · 1997
- Substrate holding case75US 5,353,934 ADai Nippon Printing Co.Ltd. · 1994
- SMIF container including a reticle support structure74US 6,216,873 B1Asyst Technologies, Inc. · 2001
- Removable cover for protecting a reticle, system including and method of using the same51US 6,239,863 B1Silicon Valley Group, Inc. · 2001
- Container for housing a mask blank, method of housing a mask blank, and a mask blank package47US 8,496,133 B2Hoya Corporation · 2013