Extreme ultraviolet inner pod seal gap
AssigneeEntegris, Inc.
InventorRuss V. Raschke
Life of this patent
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Abstract
An apparatus includes a reticle pod. The reticle pod includes a baseplate having a first surface, a cover having a second surface, and a stand-off mechanism on at least one of the cover and the baseplate. The first surface includes a first sealing surface on a periphery of the baseplate. The second surface includes a second sealing surface on a periphery of the cover. The stand-off mechanism is configured to create a linear gap between the first sealing surface and the second sealing surface when the cover is attached to the baseplate.
Claims20
An apparatus comprising a reticle pod, the reticle pod having:
- a baseplate having a first surface, the first surface including a first sealing surface on a periphery of the baseplate;
- a cover having a second surface, the second surface including a second sealing surface on a periphery of the cover;
- and
- a stand-off mechanism on at least one of the cover and the baseplate,
- wherein the stand-off mechanism is configured to prevent contact between the first sealing surface and the second sealing surface and to create sealing via a linear gap between the first sealing surface and the second sealing surface when the cover is attached to the baseplate.
A method of assembling a reticle pod, the reticle pod including a baseplate having a first surface, a cover having a second surface, and a stand-off mechanism on at least one of the cover and the baseplate, wherein the first surface includes a first sealing surface on a periphery of the baseplate, the second surface includes a second sealing surface on a periphery of the cover, the stand-off mechanism is configured to prevent contact between the first sealing surface and the second sealing surface and to create sealing via a linear gap between the first sealing surface and the second sealing surface when the cover is attached to the baseplate, the method comprising providing the stand-off mechanism on the at least one of the cover and the baseplate.
Dependencies are inferred from the claim text.