Reticle clamping module

Abstract

A reticle clamping module includes two clamping mechanisms and a plurality of anti-slip filler members. The two clamping mechanisms are disposed opposite to each other to form a reticle space. Each of the two clamping mechanisms includes a clamping member and a power member. A reticle contact surface of the clamping member is provided with a first groove, the power member is disposed at a back surface of the clamping member opposite to the reticle contact surface to push the clamping member to reciprocate, and the plurality of anti-slip filler members are respectively disposed in the first grooves of the two clamping mechanisms. The reticle clamping module of the present disclosure is capable of securely clamping and preventing damage of a reticle, as well as preventing the reticle from scratches or inappropriate forces applied thereupon.

Dependencies are inferred from the claim text.