Storage container opening/closing device and storage container opening/closing method
AssigneeLintec Corporation
InventorTakuya HAYASAKA
Life of this patent
Estimating the term…
Loading patent…
AssigneeLintec Corporation
InventorTakuya HAYASAKA
Estimating the term…
A storage container opening/closing device includes: a storage portion configured to house a frame member to which a pellicle film is attached; a cover configured to cover the storage portion; a storage container support unit configured to support the storage container; and an opening/closing unit configured to open and close the storage container by moving the cover, in which the opening/closing unit includes: a retainer configured to retain the cover; a first movement unit configured to move the cover retained by the retainer in a direction away from and toward the storage portion; and a second movement unit configured to tilt the cover retained by the retainer with respect to the storage portion.
A storage container opening/closing device configured to open and close a storage container comprising a storage portion configured to house a frame member to which a pellicle film is attached, and a cover configured to cover the storage portion, the storage container opening/closing device comprising:
A storage container opening/closing method for opening and closing a storage container comprising a storage portion configured to house a frame member to which a pellicle film is attached, and a cover configured to cover the storage portion, the method comprising:
Dependencies are inferred from the claim text.