G01N 23/2206
Combination of two or more measurements, at least one measurement being that
Official title: Combination of two or more measurements, at least one measurement being that of secondary emission, e.g. combination of secondary electron [SE] measurement and back-scattered electron [BSE] measurement
G01N23/2206 (Combination of two or more measurements, at least one measurement being that) appears on 175 US grants and 206 published applications in this corpus.
Search patents in G01N- Granted patents
- 175
- Published applications
- 206
- Assignees
- 141
- Inventors
- 585
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1989 | 2 | 0 |
| 1990 | 1 | 0 |
| 1991 | 0 | 0 |
| 1992 | 2 | 0 |
| 1993 | 2 | 0 |
| 1994 | 1 | 0 |
| 1995 | 1 | 0 |
| 1996 | 2 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 0 |
| 2002 | 1 | 0 |
| 2003 | 1 | 1 |
| 2004 | 0 | 0 |
| 2005 | 0 | 1 |
| 2006 | 1 | 2 |
| 2007 | 1 | 0 |
| 2008 | 0 | 0 |
| 2009 | 1 | 4 |
| 2010 | 1 | 3 |
| 2011 | 3 | 5 |
| 2012 | 3 | 5 |
| 2013 | 3 | 8 |
| 2014 | 8 | 5 |
| 2015 | 5 | 11 |
| 2016 | 6 | 8 |
| 2017 | 11 | 7 |
| 2018 | 8 | 8 |
| 2019 | 6 | 14 |
| 2020 | 12 | 15 |
| 2021 | 13 | 18 |
| 2022 | 12 | 22 |
| 2023 | 21 | 29 |
| 2024 | 17 | 20 |
| 2025 | 17 | 10 |
| 2026 | 13 | 10 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Overlay target measurement and shift compensation in charged particle systems and related methods6 Oct 2026US 12,754,150 B2Applied Materials Israel Ltd.
- Patterned X-ray emitting target29 Sep 2026US 12,749,642 B2Nova Measuring Instruments Ltd.
- System and method for calibrating a PET scanner28 Jul 2026US 12,693,441 B2Shanghai United Imaging Healthcare Co., Ltd.
- Hybrid X-ray and optical metrology and navigation30 Jun 2026US 12,669,452 B2Tokyo Electron Limited
- Method for analyzing quality of thin surface layer of PCB19 May 2026US 12,631,580 B2Guangzhou Termbray Electronics Tech Co., Ltd.
- Hybrid x-ray and optical metrology and navigation24 Sep 2026US 2026/0287527 A1Tokyo Electron Limited
- Measurement System, Computer, and Measurement Method10 Sep 2026US 2026/0268470 A1Hitachi High-Tech Corporation
- Method and system for core sample analysis, electronic device, and storage medium27 Aug 2026US 2026/0251593 A1PetroChina Company Limited
- Diversifying sem measurement scheme for improved accuracy6 Aug 2026US 2026/0227350 A1ASML Netherlands B. V.
- Substrate inspection apparatus18 Jun 2026US 2026/0168945 A1Samsung Electronics Co., Ltd.
Most cited
By later US patents
- Total reflection X-ray fluorescence apparatus73US 5,249,216 ASumitomo Electric Industries, Ltd. · 1993
- X-ray measurement of properties of nano-particles52US 7,680,243 B2Jordan Valley Semiconductors Ltd. · 2010
- Total reflection X-ray fluorescence apparatus32US 5,220,591 ASumitomo Electric Industries, Ltd. · 1993
- X-ray multiple spectroscopic analyzer30US 8,903,040 B2Rigaku Corporation · 2014
- X-ray multichannel spectrometer28US 7,991,109 B2Bruker AXS GmbH · 2011