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US 5,249,216 AGranted
Total reflection X-ray fluorescence apparatus
AssigneesSumitomo Electric Industries, Ltd., Technos Co., Ltd.
InventorsTetsuya Ohsugi, Michihisa Kyoto, Kazuo Nishihagi
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Abstract
A total reflection X-ray fluorescence apparatus comprises a base material having an optically flat surface for totally reflecting X-rays radiated at a small glancing angle, a first detector such as an SSD for detecting fluorescent X-rays emerging from a specimen located near the optically flat surface of the base material and a second detector such as a scintillation counter for detecting an intensity of an X-rays coming from the base material.
Claims12
A total reflection X-ray fluorescence apparatus comprising:
- a base material having an optically flat surface for totally reflecting X-rays radiated thereonto at a given glancing angle;
- monochromator means for monochromatizing X-rays radiated from an X-ray source and radiating monochromatized X-rays onto said optically flat surface at said given glancing angle;
- first detection means for detecting fluorescent X-rays emerging from a specimen located near the optically flat surface of said base material;
- second detection means for detecting an intensity of X-rays reflected from said base material;
- positioning means for setting coordinates on the optically flat surface and positioning said monochromator means;
- and
- control means for controlling said positioning means to set said coordinates in accordance with said intensity of said X-rays detected by said second detection means.
4 more elements
Dependencies are inferred from the claim text.