Total reflection X-ray fluorescence apparatus
AssigneesSumitomo Electric Industries, Ltd., Technos Co., Ltd.
InventorsTetsuya Ohsugi, Michihisa Kyoto, Kazuo Nishihagi
Life of this patent
Estimating the term…
Abstract
A total reflection X-ray fluorescence apparatus comprises a base material having an optically flat surface for totally reflecting X-rays radiated at a small glancing angle, a first detector such as an SSD for detecting fluorescent X-rays emerging from a specimen located near the optically flat surface of the base material and a second detector such as a scintillation counter for detecting intensity of X-rays coming from the base material.
Claims17
A method for adjusting a glancing angle of an X-ray beam to be radiated onto an optically flat surface, comprising the steps of:
- providing a base material having an optically flat surface;
- radiating an X-ray beam;
- positionally adjusting at least one of said optically flat surface and said X-ray beam so that said X-ray beam is parallel to and coincides with said optically flat surface, whereby said X-ray beam is adapted to be radiated directly into a scintillation counter;
- maintaining relative positions of said optically flat surface and said X-ray beam just before an intensity of said X-ray beam changes due to adjustment of relative positions between said optically flat surface and said X-ray beam;
- and
- inclining said optically flat surface at a predetermined angle on an axis intersecting said X-ray beam on said optically flat surface.
A total reflecting X-ray fluorescence apparatus comprising:
- a base material having an optically flat surface for totally reflecting X-rays radiated at a small glancing angle;
- detection means for detecting fluorescent X-rays emerging from a specimen located near the optically flat surface of said base material;
- positioning means for setting coordinates on the optically flat surface and positioning said base material;
- and
- surface inspection system for performing state inspection of the optically flat surface and obtaining inspection data of each point on the optically flat surface in correspondence with the coordinates.
A total reflecting X-ray fluorescence apparatus comprising:
- a base material having an optically flat surface for totally reflecting X-rays radiated at a small glancing angle;
- detection means for detecting fluorescent X-rays emerging from a specimen located near the optically flat surface of said base material;
- positioning means for setting coordinates on the optically flat surface and positioning said base material;
- and
- surface inspection system for performing state inspection of the optically flat surface and obtaining inspection data of each point on the optically flat surface in correspondence with said coordinates, wherein said surface inspection means comprises a laser scanner for radiating and scanning a laser beam onto said base material, and reflected light detection means for detecting a reflected light intensity of the laser beam reflected by said base material.
Dependencies are inferred from the claim text.