Hybrid X-ray and optical metrology and navigation

A system for characterizing a device under test (DUT), the system comprising:

• a broadband optical imaging system comprising a broadband optical source configured to illuminate a region of the DUT with a broadband optical beam within an optical field of view (FOV), and an optical detector having the optical FOV;
• and
• an X-ray metrology system comprising an X-ray source to illuminate a portion of the region of the DUT with an X-ray beam within an X-ray FOV at the portion of the region, and an X-ray detector having the X-ray FOV, the X-ray FOV being smaller than or equal to and overlapping the optical FOV,
• wherein the broadband optical imaging system and the X-ray metrology system are configured to
• concurrently acquire an X-ray image of the X-ray FOV and a plurality of optical images of the optical FOV, each of the plurality of optical images corresponding to respective selected wavelengths of the broadband optical beam, the selected wavelengths comprising at least one wavelength from each of the ultraviolet (UV), visible (VIS), and infrared (IR) portions of the optical spectrum, and
• determine structural properties of the DUT through scatterometry methods using the X-ray image in combination with the plurality of optical images.

A system for characterizing a substrate comprising:

• a broadband optical source configured to illuminate a region of the substrate with a broadband optical beam within an optical field of view (FOV);
• a hyperspectral imaging (HSI) snapshot camera having the optical FOV;
• an X-ray source configured to illuminate a portion of the region of the substrate with an X-ray beam within an X-ray FOV at the portion of the region;
• and
• an X-ray detector having the X-ray FOV, the X-ray FOV being smaller than or equal to and overlapping the optical FOV;
• and
• wherein the X-ray detector and the HSI snapshot camera are configured to
• concurrently acquire X-ray data from the X-ray FOV and a hyperspectral image cube of the optical FOV, the hyperspectral image cube comprising at least one wavelength from each of the deep ultraviolet (DUV), visible (VIS), and near infrared (NIR) portions of the optical spectrum, and
• determine structural properties through scatterometry methods using the X-ray data in combination with the hyperspectral image cube.