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US 7,680,243 B2Granted
X-ray measurement of properties of nano-particles
AssigneeJordan Valley Semiconductors Ltd.
InventorsBoris Yokhin, Alexander Tokar, Alexander Krokhmal, Asher Peled, Dileep Agnihotri
Life of this patent
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Abstract
A method for analyzing a sample includes directing one or more beams of X-rays to impinge on an area of a surface of the sample on which a layer of nano-particles of a selected element has been formed. Secondary X-ray radiation from the area is detected responsively to the one or more beams. A distribution of the nano-particles on the surface is characterized based on the detected radiation.
Claims16
A method for analyzing a sample, comprising:
- directing one or more beams of X-rays from at least one radiation source to impinge on an area of a surface of the sample on which a layer of nano-particles of a selected element has been formed, including a beam that is incident on the surface at a grazing angle;
- detecting, using at least one detector, an intensity of X-ray fluorescence emitted from the area in a spectral line that is characteristic of the selected element responsively to the one or more beams;
- detecting, using the at least one detector, an angular spectrum of the X-rays that are scattered from the area responsively to the beam that is incident on the surface at the grazing angle;
- and
- characterizing a distribution of the nano-particles on the surface based on the intensity of the X-ray fluorescence and the angular spectrum of the scattered X-rays.
2 more elements
Apparatus for analyzing a sample, comprising:
- at least one radiation source, which is configured to direct one or more beams of X-rays to impinge on an area of a surface of the sample on which a layer of nano-particles of a selected element has been formed, including a beam that is incident on the surface at a grazing angle;
- at least one detector, which is configured to detect an intensity of X-ray fluorescence emitted from the area in a spectral line that is characteristic of the selected element responsively to the one or more beams and to detect an angular spectrum of the X-rays that are scattered from the area responsively to the beam that is incident on the surface at the grazing angle, and to generate signals responsively to the detected intensity of the X-ray fluorescence and to the angular spectrum;
- and
- a signal processor, which is coupled to receive and process the signals so as to characterize a distribution of the nano-particles on the surface.
1 more element
Dependencies are inferred from the claim text.