X-ray multiple spectroscopic analyzer

An X-ray multiple spectroscopic analyzer comprising:

• an X-ray source radiating X-rays;
• an optical system inputting the X-rays radiated from the X-ray source to a single-crystal sample;
• a sample stage supporting the single-crystal sample, with one or more rotation driving systems for rotating the single-crystal sample;
• an X-ray diffraction detector detecting diffracted X-rays generated from the single-crystal sample;
• a rotation driving system changing the angle of the X-ray diffraction detector with respect to the single-crystal sample;
• an X-ray diffraction measurement data storage unit for storing measurement data of the diffracted X-rays detected by the X-ray diffraction detector;
• a structural analysis data analyzing unit for analyzing data of a crystal structure on the basis of the measurement data of the diffracted X-rays stored in the X-ray diffraction measurement data storage unit;
• an energy-dispersive X-ray fluorescence detector detecting fluorescent X-rays radiated from the single-crystal sample;
• an X-ray fluorescence measurement data storage unit storing measurement data of the fluorescent X-rays detected by the energy-dispersive X-ray fluorescence detector;
• an X-ray fluorescence analyzing unit for analyzing the fluorescent X-rays on the basis of the measurement data of the fluorescent X-rays stored in the X-ray fluorescence measurement data storage unit;
• a beam stopper, being disposed opposite to the optical system about the single-crystal sample and blocking a direct beam of X-rays input to the single-crystal sample from the optical system;
• an X-ray fluorescence analysis data storage unit for storing analysis data of the fluorescent X-rays output from the X-ray fluorescence analyzing unit;
• and
• X-ray fluorescence analysis data acquiring unit for acquiring the analysis data of the fluorescent X-rays stored in the X-ray fluorescence analysis data storage unit and outputting the acquired X-ray fluorescence analysis data to the structural analysis data analyzing unit,
• wherein the structural analysis data analyzing unit analyzes the data of the crystal structure further on the basis of the analysis data of the fluorescent X-rays output from the X-ray fluorescence analysis data acquiring unit, and
• wherein the energy-dispersive X-ray fluorescence detector comprises
• a light-receiving portion receiving the detected X-rays, and
• an X-ray blocking member, being disposed between the beam stopper and the light-receiving portion and blocking fluorescent X-rays radiated from a part of the beam stopper which is directly irradiated with the direct beam.