C23C 16/45578
Elongated nozzles, tubes with holes
Official title: {Elongated nozzles, tubes with holes}
C23C16/45578 (Elongated nozzles, tubes with holes) appears on 685 US grants and 985 published applications in this corpus.
Search patents in C23C- Granted patents
- 685
- Published applications
- 985
- Assignees
- 255
- Inventors
- 1,714
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1977 | 1 | 0 |
| 1978 | 3 | 0 |
| 1979 | 0 | 0 |
| 1980 | 2 | 0 |
| 1981 | 2 | 0 |
| 1982 | 1 | 0 |
| 1983 | 1 | 0 |
| 1984 | 4 | 0 |
| 1985 | 4 | 0 |
| 1986 | 3 | 0 |
| 1987 | 3 | 0 |
| 1988 | 2 | 0 |
| 1989 | 3 | 0 |
| 1990 | 0 | 0 |
| 1991 | 5 | 0 |
| 1992 | 3 | 0 |
| 1993 | 2 | 0 |
| 1994 | 2 | 0 |
| 1995 | 1 | 0 |
| 1996 | 2 | 0 |
| 1997 | 2 | 0 |
| 1998 | 4 | 0 |
| 1999 | 2 | 0 |
| 2000 | 7 | 0 |
| 2001 | 6 | 4 |
| 2002 | 9 | 6 |
| 2003 | 4 | 10 |
| 2004 | 7 | 11 |
| 2005 | 8 | 13 |
| 2006 | 2 | 24 |
| 2007 | 3 | 19 |
| 2008 | 6 | 31 |
| 2009 | 8 | 36 |
| 2010 | 12 | 34 |
| 2011 | 18 | 27 |
| 2012 | 11 | 49 |
| 2013 | 24 | 37 |
| 2014 | 26 | 34 |
| 2015 | 41 | 51 |
| 2016 | 27 | 37 |
| 2017 | 24 | 40 |
| 2018 | 28 | 72 |
| 2019 | 38 | 68 |
| 2020 | 50 | 70 |
| 2021 | 62 | 69 |
| 2022 | 55 | 51 |
| 2023 | 40 | 62 |
| 2024 | 47 | 45 |
| 2025 | 38 | 46 |
| 2026 | 32 | 39 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
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Most cited
By later US patents
- Apparatus for atomic layer chemical vapor deposition543US 6,812,157 B12004
- Apparatus and method for positioning gas injectors in a vertical furnace509US 6,435,865 B1Taiwan Semiconductor Manufacturing Company.Ltd · 2002
- Cross-flow diffusion furnace501US 4,854,266 ABTU Engineering Corporation · 1989
- Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus491US 8,076,251 B2Hitachi Kokusai Electric Inc. · 2011
- Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus486US 8,415,258 B2Hitachi Kokusai Electric Inc. · 2013