C23C 14/48
Ion implantation
C23C14/48 (Ion implantation) appears on 796 US grants and 844 published applications in this corpus.
Search patents in C23C- Granted patents
- 796
- Published applications
- 844
- Assignees
- 391
- Inventors
- 1,701
- Latest grant
- 29 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 2 | 0 |
| 1977 | 0 | 0 |
| 1978 | 5 | 0 |
| 1979 | 2 | 0 |
| 1980 | 2 | 0 |
| 1981 | 5 | 0 |
| 1982 | 2 | 0 |
| 1983 | 4 | 0 |
| 1984 | 6 | 0 |
| 1985 | 5 | 0 |
| 1986 | 6 | 0 |
| 1987 | 10 | 0 |
| 1988 | 6 | 0 |
| 1989 | 9 | 0 |
| 1990 | 10 | 0 |
| 1991 | 6 | 0 |
| 1992 | 10 | 0 |
| 1993 | 15 | 0 |
| 1994 | 10 | 0 |
| 1995 | 10 | 0 |
| 1996 | 11 | 0 |
| 1997 | 6 | 0 |
| 1998 | 11 | 0 |
| 1999 | 18 | 0 |
| 2000 | 15 | 0 |
| 2001 | 20 | 7 |
| 2002 | 15 | 13 |
| 2003 | 11 | 18 |
| 2004 | 9 | 18 |
| 2005 | 8 | 18 |
| 2006 | 12 | 25 |
| 2007 | 10 | 24 |
| 2008 | 10 | 26 |
| 2009 | 7 | 24 |
| 2010 | 24 | 34 |
| 2011 | 6 | 25 |
| 2012 | 20 | 38 |
| 2013 | 18 | 71 |
| 2014 | 40 | 58 |
| 2015 | 36 | 43 |
| 2016 | 46 | 45 |
| 2017 | 47 | 60 |
| 2018 | 34 | 40 |
| 2019 | 44 | 34 |
| 2020 | 41 | 46 |
| 2021 | 32 | 31 |
| 2022 | 27 | 34 |
| 2023 | 27 | 35 |
| 2024 | 25 | 30 |
| 2025 | 25 | 28 |
| 2026 | 16 | 19 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Cylindric decomposition for efficient mitigation of substrate deformation with film deposition and ion implantation29 Sep 2026US 12,751,253 B2APPLIED Materials.Inc.
- Air bearing shaft with wide operating temperature range11 Aug 2026US 12,706,271 B2APPLIED Materials.Inc.
- Method for the surface treatment of a jewel, in particular for the watchmaking industry4 Aug 2026US 12,698,558 B2Comadur SA
- Method and apparatus for continuous chained energy ion implantation4 Aug 2026US 12,700,562 B2Axcelis Technologies, Inc.
- Blended energy implant9 Jun 2026US 12,651,722 B2Axcelis Technologies, Inc.
- Method and apparatus for continuous chained energy ion implantation1 Oct 2026US 2026/0302126 A1Axcelis Technologies, Inc.
- Blended energy implant17 Sep 2026US 2026/0279718 A1Axcelis Technologies, Inc.
- Sputtering apparatus and method of manufacturing semiconductor device20 Aug 2026US 2026/0245836 A1Mitsubishi Electric Corporation
- Localized film stress modulation by implant20 Aug 2026US 2026/0247885 A1APPLIED Materials.Inc.
- Synthetic single-crystal diamond, method of manufacturing synthetic single-crystal diamond, and diamond substrate13 Aug 2026US 2026/0234834 A1Sumitomo Electric Industries, Ltd.
Most cited
By later US patents
- Low temperature CVD process with selected stress of the CVD layer on CMOS devices559US 7,393,765 B2APPLIED Materials.Inc. · 2008
- Solid precursor-based delivery of fluid utilizing controlled solids morphology537US 8,821,640 B2Advanced Technology Materials, Inc. · 2014
- Ultrasonic scalpel blade and methods of application489US 5,263,957 AUltracision, Inc. · 1993
- Titanium alloy blade coupler coated with nickel-chrome for ultrasonic scalpel442US 5,167,725 AUltracision, Inc. · 1992
- Clustertool system software using plasma immersion ion implantation336US 6,321,134 B1Silicon Genesis Corporation · 2001