C23C 14/46
By ion beam produced by an external ion source
Official title: by ion beam produced by an external ion source
C23C14/46 (By ion beam produced by an external ion source) appears on 254 US grants and 277 published applications in this corpus.
Search patents in C23C- Granted patents
- 254
- Published applications
- 277
- Assignees
- 208
- Inventors
- 754
- Latest grant
- 21 Apr 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1977 | 1 | 0 |
| 1978 | 1 | 0 |
| 1979 | 2 | 0 |
| 1980 | 0 | 0 |
| 1981 | 1 | 0 |
| 1982 | 0 | 0 |
| 1983 | 2 | 0 |
| 1984 | 2 | 0 |
| 1985 | 3 | 0 |
| 1986 | 1 | 0 |
| 1987 | 4 | 0 |
| 1988 | 2 | 0 |
| 1989 | 9 | 0 |
| 1990 | 6 | 0 |
| 1991 | 2 | 0 |
| 1992 | 3 | 0 |
| 1993 | 3 | 0 |
| 1994 | 4 | 0 |
| 1995 | 3 | 0 |
| 1996 | 2 | 0 |
| 1997 | 5 | 0 |
| 1998 | 4 | 0 |
| 1999 | 3 | 0 |
| 2000 | 6 | 0 |
| 2001 | 10 | 5 |
| 2002 | 16 | 14 |
| 2003 | 6 | 9 |
| 2004 | 11 | 15 |
| 2005 | 4 | 6 |
| 2006 | 3 | 9 |
| 2007 | 4 | 10 |
| 2008 | 4 | 7 |
| 2009 | 2 | 12 |
| 2010 | 2 | 9 |
| 2011 | 3 | 9 |
| 2012 | 6 | 12 |
| 2013 | 7 | 8 |
| 2014 | 9 | 11 |
| 2015 | 9 | 16 |
| 2016 | 6 | 12 |
| 2017 | 11 | 13 |
| 2018 | 10 | 11 |
| 2019 | 6 | 8 |
| 2020 | 7 | 9 |
| 2021 | 6 | 19 |
| 2022 | 6 | 14 |
| 2023 | 14 | 11 |
| 2024 | 8 | 17 |
| 2025 | 13 | 8 |
| 2026 | 2 | 3 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Film forming apparatus, control apparatus for film forming appartus, and film forming method21 Apr 2026US 12,606,904 B2Canon Anelva Corporation
- Coating method for making chip, chip substrate, and chip21 Apr 2026US 12,610,799 B2Tencent Technology (Shenzhen) Company Limited
- Protective metal oxy-fluoride coatings9 Dec 2025US 12,492,464 B2APPLIED Materials.Inc.
- Ion beam etching chamber with etching by-product redistributor23 Sep 2025US 12,424,419 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Techniques and apparatus for selective shaping of mask features using angled beams16 Sep 2025US 12,417,923 B2APPLIED Materials.Inc.
- Thin film forming device2 Jul 2026US 2026/0185211 A1Samsung Display Co., Ltd.
- Particle transfer apparatus and methods2 Apr 2026US 2026/0092358 A1ASML Netherlands B. V.
- Amorphous carbon coating method for rubber roller19 Feb 2026US 2026/0049395 A1INNOTION TECH Co., Ltd.
- Ion beam deposition of a low resistivity metal6 Nov 2025US 2025/0340977 A1Veeco Instruments Inc.
- Metal substrate coatings23 Oct 2025US 2025/0327173 A1Cathay Photonics Limited
Most cited
By later US patents
- Oxide film fabrication method and electronic device157US 6,033,532 ARead-Rite SMI Corporation · 2000
- Plasma deposition method and apparatus106US 4,492,620 ANippon Telegraph & Telephone Public Corporation · 1985
- Wear-protected device102US 4,877,677 AMatsushita Electric Industrial Co., Ltd. · 1989
- Process for barrier coating of plastic objects101US 5,364,666 ABecton, Dickinson and Company · 1994
- Process for barrier coating of plastic objects96US 5,616,369 ABecton, Dickinson and Company · 1997