C23C 14/28
By wave energy or particle radiation
Official title: by wave energy or particle radiation (C23C14/32 - C23C14/48 take precedence)
C23C14/28 (By wave energy or particle radiation) appears on 1,071 US grants and 1,279 published applications in this corpus.
Search patents in C23C- Granted patents
- 1,071
- Published applications
- 1,279
- Assignees
- 717
- Inventors
- 3,080
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 4 | 0 |
| 1977 | 4 | 0 |
| 1978 | 3 | 0 |
| 1979 | 3 | 0 |
| 1980 | 6 | 0 |
| 1981 | 2 | 0 |
| 1982 | 1 | 0 |
| 1983 | 3 | 0 |
| 1984 | 5 | 0 |
| 1985 | 8 | 0 |
| 1986 | 7 | 0 |
| 1987 | 4 | 0 |
| 1988 | 9 | 0 |
| 1989 | 3 | 0 |
| 1990 | 5 | 0 |
| 1991 | 15 | 0 |
| 1992 | 17 | 0 |
| 1993 | 25 | 0 |
| 1994 | 25 | 0 |
| 1995 | 18 | 0 |
| 1996 | 20 | 0 |
| 1997 | 25 | 0 |
| 1998 | 31 | 0 |
| 1999 | 14 | 0 |
| 2000 | 31 | 0 |
| 2001 | 18 | 7 |
| 2002 | 23 | 29 |
| 2003 | 20 | 34 |
| 2004 | 20 | 32 |
| 2005 | 14 | 34 |
| 2006 | 19 | 26 |
| 2007 | 4 | 25 |
| 2008 | 14 | 36 |
| 2009 | 13 | 58 |
| 2010 | 19 | 62 |
| 2011 | 18 | 37 |
| 2012 | 23 | 30 |
| 2013 | 33 | 39 |
| 2014 | 23 | 34 |
| 2015 | 21 | 59 |
| 2016 | 29 | 69 |
| 2017 | 39 | 104 |
| 2018 | 45 | 55 |
| 2019 | 61 | 64 |
| 2020 | 59 | 84 |
| 2021 | 51 | 70 |
| 2022 | 43 | 67 |
| 2023 | 47 | 63 |
| 2024 | 56 | 66 |
| 2025 | 45 | 59 |
| 2026 | 26 | 36 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Optimized crucible assembly and method for physical vapor deposition6 Oct 2026US 12,753,486 B2Essilor International
- Method for controlling a flux distribution of evaporated source material, detector for measuring electromagnetic radiation reflected on a source surface and system for thermal evaporation with electromagnetic radiation6 Oct 2026US 12,753,487 B2Max-Planck-Gesellschaft Zur FöRderung Der Wissenschaften E. V.
- Food packaging barrier film29 Sep 2026US 12,747,078 B2Nan Ya Plastics Corporation
- Gas-barrier polyamide film29 Sep 2026US 12,747,351 B2Toyobo Co., Ltd.
- Laser system and evaporation system8 Sep 2026US 12,729,424 B2Max-Planck-Gesellschaft Zur FöRderung Der Wissenschaften E. V.
- Computer Implemented Method for Predicting a Level of Quality of a Vacuum into a Vacuum Chamber of a Coating Machine, and Corresponding Device8 Oct 2026US 2026/0308751 A1Essilor International
- Vapour deposition device and method of depositing a material layer onto a substrate24 Sep 2026US 2026/0286503 A1Demcon Tsst B.V.
- Vacuum coating system24 Sep 2026US 2026/0286507 A1
- Eyewear with antibacterial coating17 Sep 2026US 2026/0275530 A1Zenni Optical, Inc.
- Fabrication method of high-aspect-ratio double-layer diamond nanostructure17 Sep 2026US 2026/0275574 A1Institute of Physics, Chinese Academy of Sciences
Most cited
By later US patents
- Endoluminal device exhibiting improved endothelialization and method of manufacture thereof531US 6,379,383 B1Advanced Bio Prosthetic Surfaces, Ltd. · 2002
- Systems and methods for the combinatorial synthesis of novel materials320US 6,045,671 ASymyx Technologies, Inc. · 2000
- Endocurietherapy293US 5,342,283 A1994
- Ultraviolet laser system and method for forming vias in multi-layered targets258US 5,593,606 AElectro Scientific Industries, Inc. · 1997
- Thin film ferroelectric composites and method of making190US 5,846,893 A1998