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US 5,846,893 AGranted
Thin film ferroelectric composites and method of making
OwnerSomnath Sengupta, Louise Senguptainventors
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Abstract
A thin film composite material comprises barium strontium titanate represented as Ba.sub.1-x Sr.sub.x TiO.sub.3 wherein x is greater than 0.0 but less than or equal to 0.75 and a magnesia-based compound such as MgZrO.sub.3, MgTiO.sub.3, MgAl.sub.2 O.sub.4 and mixtures thereof. The thin film ferroelectric composite is made using pulsed laser deposition and exhibits high tunability, low loss and a low dielectric constant.
Claims13
A thin film ferrolectric composite material comprising:
- barium strontium titanate, said barium strontium titanate represented as Ba.sub.1-x Sr.sub.x TiO.sub.3, wherein x is greater then 0.0 but less than or equal to 0.75;
- and a magnesia-based compound:
- wherein the weight ratio of said barium strontium titanate and said magnesia based compound ranges from approximately 99%-40% barium strontium titanate to approximately 1%-60% magnesia based compound in effective amounts to provide a composite having a low dielectric constant, low loss tangent and high tunability.
A method of making a thin film ferrolectric composite material comprising the steps of:
- a) providing at least one ceramic disc as an oblation target of a composition comprising barium strontium titanate, said barium strontium titanate represented as Ba.sub.1-x Sr.sub.x TiO.sub.3, wherein x is greater than 0.0 but less than or equal to 0.75;
- and a magnesia based compound, wherein the weight ratio of said barium strontium titanate and to said magnesia-based compounds ranges from 99-40% barium strontium titanate to approximately 1-60% magnesia based compounds (are present) in an effective amount to provide a composite having a low dielectric constant, low loss tangent and a high tunability
- b) providing a substrate;
- and
- c) depositing a thin film of said composition on said substrate using a pulsed laser.
2 more elements
Dependencies are inferred from the claim text.